Product
Park NX20 is the most advanced nano-shape measurement tool for failure analysis and research and development on large samples.Handling Company
Park Systems Japan Co., Ltd.Categories
Product Image | Part Number | Price (excluding tax) | CCD pixel | Field of view | Focus stage drive range | Sample size | Sample weight | XY scanner scan range | XY stage drive range | Z Scanner Height (Height) Noise Level | Z scanner scan range | Z stage driving distance |
---|---|---|---|---|---|---|---|---|---|---|---|---|
NX20 |
Available upon quote | 1M pixels, 5M pixels (optional) | 840µm x 630µm (when using 10x objective lens) | 15mm (electric) | Open space up to 100mm x 100mm, thickness up to 20mm (up to 200mm x 200mm available as an option) | <500g | 100µm x 100µm (50µm x 50µm as option) | 150mmx150mm (electric) | 30pm, 0.5kHz bandwidth/rms (typical) | 15μm (30μm as option) | 25mm (electric) |