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  4. Reliably detects defects in photomask films AIS-928 series Film inspection machine AIS-928D (Shirai Electronics Industry Co., Ltd.)
Reliably detects defects in photomask films AIS-928 series Film inspection machine AIS-928D-AIS-928D
Reliably detects defects in photomask films AIS-928 series Film inspection machine AIS-928D-Shirai Electronics Industry Co., Ltd.

Reliably detects defects in photomask films AIS-928 series Film inspection machine AIS-928D
Shirai Electronics Industry Co., Ltd.

About This Product

Features

■Detect minute defects

Using a high-resolution CCD camera and image processing calculations, we detect minute defects that are difficult to detect with the naked eye.

■High precision inspection

Repeatability: High precision inspection of ±3μm is possible.

■Easy measurement

You can easily measure by simply setting a rectangular range around the point you want to measure (pattern width or distance between patterns).

■Short inspection time

Non-inspection areas can be set, reducing inspection time.

■Comparative inspection with design data

Comparison tests with Gerber data are possible.

  • Product

    Reliably detects defects in photomask films AIS-928 series Film inspection machine AIS-928D

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1 Models of Reliably detects defects in photomask films AIS-928 series Film inspection machine AIS-928D

Image Part Number Price (excluding tax) Power supply Weight Read data format Repeatability Inspection items Film to be inspected Inspection target size (mm) Feeding size (mm) External dimensions (WxHxD) (mm) Resolution CCD
Reliably detects defects in photomask films AIS-928 series Film inspection machine AIS-928D-Part Number-AIS-928D

AIS-928D

Available upon quote

AC220V/single phase/2.5KVA

Approximately 650kg

DRC

±1.5pixel

Open, short, pinhole, chipped
Pattern width, protrusions, scratches, foreign objects, dust, presence of pads

Glass film, black film, brown film

Max: 680×780

Max: 718×823

1,530x1,800x1,400
(Does not include monitor part)

2~7.5μm/pixel

2048×1088pixels (2M pixels)

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About Company Handling This Product

Shirai Electronics Industry Co., Ltd.

  • Japan

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