Reliably detects defects in photomask films AIS-928 series Film inspection machine AIS-928D
Shirai Electronics Industry Co., Ltd.
About This Product
Features
■Detect minute defects
Using a high-resolution CCD camera and image processing calculations, we detect minute defects that are difficult to detect with the naked eye.
■High precision inspection
Repeatability: High precision inspection of ±3μm is possible.
■Easy measurement
You can easily measure by simply setting a rectangular range around the point you want to measure (pattern width or distance between patterns).
■Short inspection time
Non-inspection areas can be set, reducing inspection time.
■Comparative inspection with design data
Comparison tests with Gerber data are possible.
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Product
Reliably detects defects in photomask films AIS-928 series Film inspection machine AIS-928D
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Handling Company
Shirai Electronics Industry Co., Ltd.
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Categories
1 Models of Reliably detects defects in photomask films AIS-928 series Film inspection machine AIS-928D
| Product Image | Part Number | Price (excluding tax) | CCD | External dimensions (WxHxD) (mm) | Feeding size (mm) | Film to be inspected | Inspection items | Inspection target size (mm) | Power supply | Read data format | Repeatability | Resolution | Weight |
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
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AIS-928D |
Available upon quote | 2048×1088pixels (2M pixels) |
1,530x1,800x1,400 (Does not include monitor part) |
Max: 718×823 | Glass film, black film, brown film |
Open, short, pinhole, chipped Pattern width, protrusions, scratches, foreign objects, dust, presence of pads |
Max: 680×780 | AC220V/single phase/2.5KVA | DRC | ±1.5pixel | 2~7.5μm/pixel | Approximately 650kg |
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