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Fluid measurement control equipment Mass flow controller/meterHandling Company
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| Product Image | Part Number | Price (excluding tax) | Accuracy | Accuracy guaranteed temperature | Allowable storage temperature | Control range | Digital communication | Digital interface | Display | Electrical connections | Event output | Fitting (body diameter) | Flow rate output signal | Flow rate setting signal | Full scale flow rate (N2 conversion) | Gas contact material | He leak crate | Joint/face-to-face dimensions | Maximum inlet pressure | Operating differential pressure | PI function | Permissible ambient humidity | Permissible ambient temperature | Pressure resistance | Product name | Reproducibility | Required power supply | Responsiveness | Sensor method | Target gas | Temperature coefficient | Valve method | Weight |
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MODEL ST-500 SERIES |
Available upon quote |
±1%S.P. (10~100%F.S.) ±0.1%F.S. (2~10%F.S.) |
15~40℃ | 0~60℃ | 2~100%F.S. | - | DeviceNet M12 (Male) 5pin | - | - | - | - | - | - |
100SCCM~10SLM 30SLM |
SUS316L, PTFE, Au, Co-Ni | 1×10-11Pa・m3/sec or less |
1.125”W Seal 92mm Equivalent to 1/4” VCR |
Maximum inlet pressure |
50~300kPa 200~300kPa |
Overshoot ±2%F.S. | 0~80%RH (no condensation) | 5~50℃ | 1MPa (G) | PI mass flow controller | ±0.2%F.S. | 11~25VDC (5VA max) | Within 1sec | Thermal wire-wound sensor | - | - | Proportional solenoid valve (closed when de-energized) | Approximately 1,000g |
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EXE-FLOW™ MODEL EX-700R SERIES |
Available upon quote |
±1%F.S. ±1.5%F.S. |
15~35℃ | -10~60℃ | - | RS485 (MODBUS protocol, RTU mode) | - | 4 digit 7 segment LED | D-sub9 pin | 2 NPN open collector points (maximum rating 30VDC 50mA) |
Standard: 1/4SWL Options: 1/8SWL, 1/4VCR, Rc1/4 (9/16-18 UNF) |
4~20mA (load resistance 500Ω or less) 0~5VDC (Load resistance 10kΩ or more) 1~5VDC (load resistance 10kΩ or more) |
- | 10/50/100/500SCCM 1/5/10/20SLM | SUS316L, SUS316, PTFE, FKM (option NBR or CR) | - | - | 500kPa (G) | - | - | 10~90%RH (no condensation) | 5~50℃ | 1mPa (G) | Digital mass flow meter with display | ±0.2%F.S. | 24DC (±10%) 100mA or less | - | Thermal wire-wound sensor | N₂ (Air, H₂, He, Ar, O₂, CO₂, CH₄/C.F. switching) | - | - | Approx. 600g (not including valve) |
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MODEL EX-250S SERIES |
Available upon quote | ±1%F.S. | 15~35℃ | -10~60℃ | 2~100%F.S. | RS485 | - | - |
D-sub9 pin RJ45 connector x 2 |
1 NPN open collector (maximum rating 30VDC 50mA) (24VDC power supply specification only) |
Standard: 1/4SWL Options: 1/8SWL, 1/4VCR, Rc1/4 (9/16-18UNF) |
0~5VDC (load resistance 10kΩ or more) or 4~20mA (load resistance 500Ω or less) or 4~20mA (input impedance approx. 250Ω) |
0~5VDC (input impedance approx. 1MΩ) or 4~20mA (input impedance approx. 250Ω) | 5SCCM~10SLM | SUS316L, SUS316, magnetic stainless steel, PTFE, FKM (option NBR or CR) | 1×10-8Pa・m3/sec or less | - | 500kPa (G) |
F.S.＜10SLM 50~300kPa (Ar CO2: 100~300kPa) F.S.10SLM 100~350kPa (Ar CO2: 150~300kPa) |
- | 10~90%RH (no condensation) | 5~50℃ | 1MPa (G) | Small digital mass flow controller/meter | ±0.2%F.S. |
+15VDC (±5%) 100mA or less -15VDC (±5%) 150mA or less or 24VDC (±10%) 300mA or less |
Full flow range within 1sec (within±2%F.S.) (F.S.5SCCM only within 2 seconds) (L: 50~149kPa H: 150~300kPa) |
Thermal wire-wound sensor | N₂, Air, H₂, He, Ar, O₂, CO₂, etc. | - | Proportional solenoid valve (closed when de-energized) | Approximately 500g |
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MODEL EX-550 SERIES |
Available upon quote |
±1%S.P. (25~100%F.S.) ±0.25%F.S. (~25%F.S.) |
15~35℃ | -10~60℃ | 2~100%F.S. | RS485 | - | - | D-sub9 pin HR-10A×2 | - | Equivalent to 1/4 VCR | 0~5VDC (load resistance 10kΩ or more) or 4~20mA (load resistance 500Ω or less) | 0~5VDC (input impedance approx. 1MΩ) or 4~20mA (input impedance approx. 250Ω) | 10SCCM~5SLM | SUS316L, magnetic stainless steel, PTFE | 1×10-11Pa・m3/sec or less | - | Maximum inlet pressure | 50~300kPa (Ar CO2: 100~300kPa) | - | 10~90%RH (no condensation) | 5~50℃ | 1MPa (G) | Metal Seal Digital Mass Flow Controller/Meter | ±0.2%F.S. | +15VDC (±5%) 100mA or less -15VDC (±5%) 150mA or less or 24VDC (±10%) 180mA or less |
Full flow range within 1sec (within±2%F.S.) (L: 50~149kPa H: 150~300kPa) |
Thermal wire-wound sensor | N₂, Air, H₂, He, Ar, O₂, CO₂, etc. | - | Proportional solenoid valve (closed when de-energized) | Approximately 800g |
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MODEL 8700 SERIES |
Available upon quote | ±1%F.S. (25℃) | - | -10~60℃ | 2~100%F.S. | RS485 | - | 4 digit 7 segment LED | D-sub half pitch 20 pin Hirose Electric DX10M-20S | - | Standard: Rc1/4 Option: 1/4SWL, 1/8SWL, 1/4VCR (9/16-18UNF) | 0~5VDC (Load resistance 250kΩ or more) /4~20mA (Load resistance 300Ω or less) | 0~5VDC (input impedance 100kΩ or more) /4~20mA (input impedance approximately 250Ω) | 10SCCM~20SLM | SUS316, SUS316L, magnetic stainless steel (MFC only), FKM (option NBR or CR) | 1×10-8Pa・m3/sec or less | - | 500kPa (G) | F.S.≦5SLM 50~300kPa F.S.＞5SLM 100~300kPa | - | 10~90%RH (no condensation) | 5~45℃ | 1MPa (G) | Mass flow controller/meter with display | ±0.5%F.S. | 24VDC (±10%) 300mA or less | Within 2sec (within±2%F.S.) | Thermal wire-wound sensor | N₂, Air, H₂, He, Ar, O₂, CO₂, etc. | ±0.1%F.S./℃ (15~35℃) | Proportional solenoid valve (closed when de-energized) | Approximately 1,200g |
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MODEL 3660 SERIES |
Available upon quote | ±1%F.S. (25℃) | - | -10~60℃ | 2~100%F.S. | - | - | - | D-sub 9 pin KFC standard (SEMI standard compliant) | - | Standard: 1/4SWL, Option: 1/8SWL, 1/4VCR, Rc1/4 (9/16-18UNF) | 0~5VDC (Load resistance 250kΩ or more) | 0~5VDC (input impedance 1MΩ or more) | 10SCCM~20SLM | SUS316L, SUS316, magnetic stainless steel, FKM (option NBR or CR) | 1×10-8Pa・m3/sec or less | - | 500kPa (G) | F.S.≦5SLM 50~300kPa, F.S.＞5SLM 100~300kPa | - | 10~90%RH (no condensation) | 5~45℃ | 1MPa (G) | Standard mass flow controller | ±0.5%F.S | +15VDC (±5%) 100mA, -15VDC (±5%) 250mA | Within 2sec (within±2%F.S.) | Thermal wire-wound sensor | N₂, Air, H₂, He, Ar, O₂, CO₂, etc. | ±0.1%F.S./℃ (15~35℃) | Proportional solenoid valve (closed when de-energized) | Approximately 1,000g |
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MODEL 3760 SERIES |
Available upon quote | ±1%F.S. (25℃) | - | -10~60℃ | - | - | - | - | D-sub 9 pin KFC standard (SEMI standard compliant) | - | Standard: 1/4SWL, Option: 1/8SWL, 1/4VCR, Rc1/4 (9/16-18UNF) | 0~5VDC (Load resistance 250kΩ or more) | - | 10SCCM~20SLM | SUS316L, FKM (option NBR or CR) | 1×10-8Pa・m3/sec or less | - | 500kPa (G) | - | - | 10~90%RH (no condensation) | 5~45℃ | 1MPa (G) | Standard mass flow meter | ±0.5%F.S. (20℃) | +15VDC (±5%) 100mA, -15VDC (±5%) 100mA | - | Thermal wire-wound sensor | N₂, Air, H₂, He, Ar, O₂, CO₂, etc. | ±0.1%F.S./℃ (15~35℃) | - | Approximately 800g |
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MODEL 3200 SERIES |
Available upon quote | ±1%F.S. | 15~35℃ | -10~60℃ | 2~100%F.S. | - | - | - | D-sub 9 pin KFC standard (SEMI standard compliant) | - | Standard: 1/4SWL, Option: 1/8SWL, 1/4VCR, Rc1/4 (9/16-18UNF) | 0~5VDC (Load resistance 250kΩ or more) | 0~5VDC (input impedance 1MΩ or more) | 1SCCM~20SLM | SUS316L, Ni, PTFE, FKM (option NBR or CR) | 1×10-8Pa・m3/sec or less | - | Maximum inlet pressure | F.S.≦5SLM 50~300kPa, F.S.＞5SLM 100~300kPa | - | 10~90%RH (no condensation) | 0~50℃ | 1MPa (G) | High grade mass flow controller | ±0.2%F.S. | +15VDC (±5%) 100mA, -15VDC (±5%) 200mA | Within 1sec (within±2%F.S.) | Thermal wire-wound sensor | N₂, Air, H₂, He, Ar, O₂, CO₂, etc. | - | Proportional solenoid valve (closed when de-energized) | Approximately 1,000g |
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MODEL 3100 SERIES |
Available upon quote | ±1%F.S. | 15~35℃ | -10~60℃ | - | - | - | - | D-sub 9 pin KFC standard (SEMI standard compliant) | - | Standard: 1/4SWL, Option: 1/8SWL, 1/4VCR, Rc1/4 (9/16-18UNF) | 0~5VDC (Load resistance 250kΩ or more) | - | 1SCCM~20SLM | SUS316L, Ni, PTFE, FKM (option NBR or CR) | 1×10-8Pa・m3/sec or less | - | 500kPa (G) | - | - | 10~90%RH (no condensation) | 0~50℃ | 1MPa (G) | High grade mass flow meter | ±0.2%F.S. | +15VDC (±5%) 100mA, -15VDC (±5%) 100mA | - | Thermal wire-wound sensor | N₂, Air, H₂, He, Ar, O₂, CO₂, etc. | - | - | Approximately 800g |
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MODEL 5100 SERIES |
Available upon quote | ±1%F.S. | 15~35℃ | -10~60℃ | 2~100%F.S. | - | - | - | D-sub 9 pin KFC standard (SEMI standard compliant) | - | Equivalent to 1/4 VCR | 0~5VDC (Load resistance 250kΩ or more) | 0~5VDC (input impedance 1MΩ or more) | 1SCCM~20SLM | SUS316L, Ni, PTFE, Au | 1×10-11Pa・m3/sec or less | - | Maximum inlet pressure | F.S.≦5SLM 50~300kPa, F.S.＞5SLM 100~300kPa | - | 10~90%RH (no condensation) | 0~50℃ | 1MPa (G) | Metal seal mass flow controller | ±0.2%F.S. | +15VDC (±5%) 100mA, -15VDC (±5%) 200mA | Within 1sec (within±2%F.S.) | Thermal wire-wound sensor | N₂, Air, H₂, He, Ar, O₂, CO₂, etc. | - | Proportional solenoid valve (closed when de-energized) | Approximately 1,000g |
Click on the part number for more information about each product
