Gas analyzer: Process gas monitor CGM-2 series
Sanko Ematech Co., Ltd.
About This Product
■Product description
・Resolution: M/△M=1M (10% P.H.)
・Power supply voltage: DC24V±10% 50W
・Maximum baking temperature (when sensor unit is connected): 120℃
・Maximum baking temperature (when sensor unit is attached and detached): 250℃
・Using temperature range: 10~40℃
・Interface: Ethernet
・Software: Compatible with Qulee QCS Ver.4.2 or later (Windows 8/10/11)
・Compliant standard: CE
■Applications
Residual gas analysis of sputtering equipment: Used to analyze residual gases generated in sputtering equipment. This helps in process control and product quality improvement. Process Monitoring: Used to monitor sputtering processes to aid in process stability and quality control. Impurity (H2O) Control: Used for moisture impurity control and is useful in processes where moisture control is critical.
Leak test for sputtering equipment: Used for leak testing of sputtering equipment, useful for checking sealing and leakage.
■Features
Ideal for sputtering processes: This equipment has features that make it ideally suited for sputtering processes. CGM helps monitor and manage that process. Air Leak Monitoring: Provides the ability to monitor air leaks. This is an important element in the quality control of products and processes. Residual moisture management: Residual moisture can be managed. Moisture control is important in many manufacturing processes.
No differential pumping system required for process monitoring: No differential pumping system is required for process monitoring, allowing very low pressures (below 1Pa) to be measured and saving space.
Capable of high-sensitivity leak testing: Particularly sensitive leak testing is possible, and the CGM2-052 model offers this feature. Leak tests are used to check sealability and control quality. Capable of measuring total pressure: Capable of measuring the entire pressure range. Integrated display design: No computer is required; the display is integrated into the main body, so measurements can be taken without a computer.
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Product
Gas analyzer: Process gas monitor CGM-2 series
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Handling Company
Sanko Ematech Co., Ltd.
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Categories
4 Models of Gas analyzer: Process gas monitor CGM-2 series
Items marked with have different values depending on the model number.
Click on the part number for more information about each product
| Product Image | Part Number | Price (excluding tax) | DEGAS function | Detector | Linearity: | Manufacturer | Mass number range | Mass separation method | Maximum working pressure | Minimum detection partial pressure | One Click leak check function | Sensitivity | Total pressure measurement function |
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CGM2-051 |
Available upon quote | Yes / Electron shock detachment method / 300V / 5mA | Faraday cup | 1Pa | ULVAC Co., Ltd. | 1~50 amu | Quadrupole mass spectrometer | 2Pa | 1×10-7Pa | Yes / He / H2O / N2 / O2 / Any gas | 0.1uA/Pa | Can be |
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CGM2-101 |
Available upon quote | - | Faraday cup | 1Pa | ULVAC Co., Ltd. | 1~100 amu | Quadrupole mass spectrometer | 2Pa | 1×10-7Pa | - | 0.1uA/Pa | Can be |
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CGM2-052 |
Available upon quote | Yes / Electron shock detachment method / 300V / 5mA | Faraday cup | 1Pa | ULVAC Co., Ltd. | 1~50 amu | Quadrupole mass spectrometer | 2Pa (FC) 1×10-2Pa (SEM) | 1×10-10Pa | Yes / He / H2O / N2 / O2 / Any gas | 0.1mA/Pa | Can be |
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CGM2-102 |
Available upon quote | Yes / Electron shock detachment method / 300V / 5mA | Faraday cup | 1Pa | ULVAC Co., Ltd. | 1~100 amu | Quadrupole mass spectrometer | 2Pa (FC) 1×10-2Pa (SEM) | 1×10-10Pa | Yes / He / H2O / N2 / O2 / Any gas | 0.1mA/Pa | Can be |
Click on the part number for more information about each product
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About Company Handling This Product
- Japan