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  4. Gas analyzer: Process gas monitor CGM-2 series (Sanko Ematech Co., Ltd.)
Gas analyzer: Process gas monitor CGM-2 series-CGM2-051
Gas analyzer: Process gas monitor CGM-2 series-Sanko Ematech Co., Ltd.

Gas analyzer: Process gas monitor CGM-2 series
Sanko Ematech Co., Ltd.

Sanko Ematech Co., Ltd.'s Response Status

Response Rate

100.0%

Response Time

38.3hours

Company Review

5.0

About This Product

■Product description

・Resolution: M/△M=1M (10% P.H.) ・Power supply voltage: DC24V±10% 50W ・Maximum baking temperature (when sensor unit is connected): 120℃ ・Maximum baking temperature (when sensor unit is attached and detached): 250℃ ・Using temperature range: 10~40℃ ・Interface: Ethernet ・Software: Compatible with Qulee QCS Ver.4.2 or later (Windows 8/10/11) ・Compliant standard: CE

■Applications

Residual gas analysis of sputtering equipment: Used to analyze residual gases generated in sputtering equipment. This helps in process control and product quality improvement. Process Monitoring: Used to monitor sputtering processes to aid in process stability and quality control. Impurity (H2O) Control: Used for moisture impurity control and is useful in processes where moisture control is critical. Leak test for sputtering equipment: Used for leak testing of sputtering equipment, useful for checking sealing and leakage.

■Features

Ideal for sputtering processes: This equipment has features that make it ideally suited for sputtering processes. CGM helps monitor and manage that process. Air Leak Monitoring: Provides the ability to monitor air leaks. This is an important element in the quality control of products and processes. Residual moisture management: Residual moisture can be managed. Moisture control is important in many manufacturing processes. No differential pumping system required for process monitoring: No differential pumping system is required for process monitoring, allowing very low pressures (below 1Pa) to be measured and saving space. Capable of high-sensitivity leak testing: Particularly sensitive leak testing is possible, and the CGM2-052 model offers this feature. Leak tests are used to check sealability and control quality. Capable of measuring total pressure: Capable of measuring the entire pressure range. Integrated display design: No computer is required; the display is integrated into the main body, so measurements can be taken without a computer.

  • Product

    Gas analyzer: Process gas monitor CGM-2 series

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4 Models of Gas analyzer: Process gas monitor CGM-2 series

Click on the part number for more information about each product

Image Part Number Price (excluding tax) Mass number range Mass separation method Detector Minimum detection partial pressure Maximum working pressure Sensitivity Total pressure measurement function Linearity: Manufacturer One Click leak check function DEGAS function
Gas analyzer: Process gas monitor CGM-2 series-Part Number-CGM2-051

CGM2-051

Available upon quote

1~50 amu

Quadrupole mass spectrometer

Faraday cup

1×10-7Pa

2Pa

0.1uA/Pa

Can be

1Pa

ULVAC Co., Ltd.

Yes / He / H2O / N2 / O2 / Any gas

Yes / Electron shock detachment method / 300V / 5mA

Gas analyzer: Process gas monitor CGM-2 series-Part Number-CGM2-101

CGM2-101

Available upon quote

1~100 amu

Quadrupole mass spectrometer

Faraday cup

1×10-7Pa

2Pa

0.1uA/Pa

Can be

1Pa

ULVAC Co., Ltd.

- -
Gas analyzer: Process gas monitor CGM-2 series-Part Number-CGM2-052

CGM2-052

Available upon quote

1~50 amu

Quadrupole mass spectrometer

Faraday cup

1×10-10Pa

2Pa (FC) 1×10-2Pa (SEM)

0.1mA/Pa

Can be

1Pa

ULVAC Co., Ltd.

Yes / He / H2O / N2 / O2 / Any gas

Yes / Electron shock detachment method / 300V / 5mA

Gas analyzer: Process gas monitor CGM-2 series-Part Number-CGM2-102

CGM2-102

Available upon quote

1~100 amu

Quadrupole mass spectrometer

Faraday cup

1×10-10Pa

2Pa (FC) 1×10-2Pa (SEM)

0.1mA/Pa

Can be

1Pa

ULVAC Co., Ltd.

Yes / He / H2O / N2 / O2 / Any gas

Yes / Electron shock detachment method / 300V / 5mA

Click on the part number for more information about each product

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About Company Handling This Product

Sanko Ematech Co., Ltd.

Response Rate

100.0%

Response Time

38.3hrs

Company Review

5.0
  • Japan

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