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Turbo molecular pump UTM-MI seriesHandling Company
Sanko Ematech Co., Ltd.Categories
Click on the part number for more information about each product
| Image | Part Number | Price (excluding tax) | Noise [dB (A)] | Selection specifications: Requirement of special bolts for fixing the pump | Selected specifications AC cable | Compatible standards | Startup time [min] | Mass [Kg] | Surface treatment | Standard accessories | Maximum air supply port pressure [Pa] | Maximum exhaust port pressure [Pa] | Recommended auxiliary pump | Exhaust speed [L/sec] | Exhaust port | External control (remote interface) | External control (serial interface) | Compression ratio | Variable rotation speed mechanism | Rotation speed [min-1] | Intake port | Mounting direction | Ultimate pressure [Pa] | Cooling water flow rate [L/min] | Cooling water pressure [MpaG] | Cooling method | Manufacturer | Controller power supply | Controller configuration | Controller maximum required power | Optional items |
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
|
|
UTM1200A |
Available upon quote |
57 |
Essential (M10) |
AC connector/AC cable (5m/10m/15m/20m) |
CE, TUVus |
8 |
43 |
None |
Air supply port O-ring (VG only), exhaust port dust cap, remote control connector, instruction manual (CD-ROM) |
26 |
266 |
600L/min or more |
N2→1,030, Ar→980, H2→660 |
KF40 |
D-sub 25 pin female contact input/output |
Dedicated round connector RS232C/RS485 |
N2→2×10^8, He→7×10^3, H2→8×10^2 |
The operating speed can be changed between 25% and 100% of the specified pump speed. |
37,200 |
VG150, ISO160F |
Can be installed in all directions |
1×10-7 board |
3~4 |
0.2~0.4 |
Water cooling |
ULVAC Co., Ltd. |
Single phase AC200V~240V±10% (50~60Hz ±2Hz) |
Integrated with the pump body (built into the bottom) |
0.75kVA |
Gas port adapter KF10 |
|
|
UTM1600A |
Available upon quote |
57 |
Unnecessary |
AC connector/AC cable (5m/10m/15m/20m) |
CE, TUVus |
8 |
41 |
None |
Air supply port O-ring (VG only), exhaust port dust cap, remote control connector, instruction manual (CD-ROM) |
26 |
266 |
600L/min or more |
N2→1,400, Ar→1,330, H2→750 |
KF40 |
D-sub 25 pin female contact input/output |
Dedicated round connector RS232C/RS485 |
N2→2×10^8, He→7×10^3, H2→8×10^2 |
The operating speed can be changed between 25% and 100% of the specified pump speed. |
37,200 |
VG200, VG250, ISO200F, ISO250F |
Can be installed in all directions |
1×10-7 board |
3~4 |
0.2~0.4 |
Water cooling |
ULVAC Co., Ltd. |
Single phase AC200V~240V±10% (50~60Hz ±2Hz) |
Integrated with the pump body (built into the bottom) |
0.75kVA |
Gas port adapter KF10 |
|
|
UTM2300A |
Available upon quote |
60 |
Unnecessary |
AC connector/AC cable (5m/10m/15m/20m) |
CE, TUVus |
9 |
56 |
None |
Air supply port O-ring (VG only), exhaust port dust cap, remote control connector, instruction manual (CD-ROM) |
4.5 |
200 |
1,500L/min or more |
N2→2,100, Ar→2,000, H2→1,380 |
KF40 |
D-sub 37 pin female contact input/output |
D-sub9 pin male RS232C/RS485 |
N2→1×10^8 or more, He→5×10^3, H2→9×10^2 |
The operating speed can be changed between 25% and 100% of the specified pump speed. |
33,700 |
VG250, ISO250F |
Can be installed in all directions |
1×10-7 board |
3~4 |
0.2~0.4 |
Water cooling |
ULVAC Co., Ltd. |
Single phase AC200V~240V±10% (50~60Hz ±2Hz) |
Integrated with the pump body (built into the bottom) |
1.2kVA |
Gas port adapter KF10 |
|
|
UTM3400A |
Available upon quote |
60 |
Unnecessary |
AC connector/AC cable (5m/10m/15m/20m) |
CE, TUVus |
16 |
94 |
None |
Air supply port O-ring (VG only), exhaust port dust cap, remote control connector, instruction manual (CD-ROM) |
7 |
270 |
1,500L/min or more |
N2→3,200, Ar→3,100, H2→2,100 |
KF40 |
D-sub 37 pin female contact input/output |
D-sub9 pin male RS232C/RS485 |
N2→1×10^9 or more, He→1×10^5, H2→6×10^3 |
The operating speed can be changed between 25% and 100% of the specified pump speed. |
27,600 |
VG300, VG350, ISO320F |
Can be installed in all directions |
1×10-7 board |
3~4 |
0.2~0.4 |
Water cooling |
ULVAC Co., Ltd. |
Single phase AC200V~240V±10% (50~60Hz ±2Hz) |
Integrated with the pump body (built into the bottom) |
1.2kVA |
Gas port adapter KF10 |
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