Turbo molecular pump UTM-MI series
Sanko Ematech Co., Ltd.
About This Product
■Product description
A turbo molecular pump with integrated controller that uses magnetic bearings. By integrating the pump body and controller, wiring and space savings are achieved.
■Features
Since the pump body and controller are integrated, there is no need for troublesome wiring. There are no restrictions on the mounting direction and it can be mounted in any direction, increasing the degree of freedom when designing equipment. Wide area high flow rate design suitable for light processes. Pump rotation speed can be changed. Chamber pressure can be adjusted within the rotation speed range of 25-100%. It has passed various tests to confirm safety, including atmospheric entry tests and touchdown tests.
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Product
Turbo molecular pump UTM-MI series
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Handling Company
Sanko Ematech Co., Ltd.
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Categories
4 Models of Turbo molecular pump UTM-MI series
Items marked with have different values depending on the model number.
Click on the part number for more information about each product
| Product Image | Part Number | Price (excluding tax) | Compatible standards | Compression ratio | Controller configuration | Controller maximum required power | Controller power supply | Cooling method | Cooling water flow rate [L/min] | Cooling water pressure [MpaG] | Exhaust port | Exhaust speed [L/sec] | External control (remote interface) | External control (serial interface) | Intake port | Manufacturer | Mass [Kg] | Maximum air supply port pressure [Pa] | Maximum exhaust port pressure [Pa] | Mounting direction | Noise [dB (A)] | Optional items | Recommended auxiliary pump | Rotation speed [min-1] | Selected specifications AC cable | Selection specifications: Requirement of special bolts for fixing the pump | Standard accessories | Startup time [min] | Surface treatment | Ultimate pressure [Pa] | Variable rotation speed mechanism |
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UTM1200A |
Available upon quote | CE, TUVus | N2→2×10^8, He→7×10^3, H2→8×10^2 | Integrated with the pump body (built into the bottom) | 0.75kVA | Single phase AC200V~240V±10% (50~60Hz ±2Hz) | Water cooling | 3~4 | 0.2~0.4 | KF40 | N2→1,030, Ar→980, H2→660 | D-sub 25 pin female contact input/output | Dedicated round connector RS232C/RS485 | VG150, ISO160F | ULVAC Co., Ltd. | 43 | 26 | 266 | Can be installed in all directions | 57 | Gas port adapter KF10 | 600L/min or more | 37,200 | AC connector/AC cable (5m/10m/15m/20m) | Essential (M10) | Air supply port O-ring (VG only), exhaust port dust cap, remote control connector, instruction manual (CD-ROM) | 8 | None | 1×10-7 board | The operating speed can be changed between 25% and 100% of the specified pump speed. |
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UTM1600A |
Available upon quote | CE, TUVus | N2→2×10^8, He→7×10^3, H2→8×10^2 | Integrated with the pump body (built into the bottom) | 0.75kVA | Single phase AC200V~240V±10% (50~60Hz ±2Hz) | Water cooling | 3~4 | 0.2~0.4 | KF40 | N2→1,400, Ar→1,330, H2→750 | D-sub 25 pin female contact input/output | Dedicated round connector RS232C/RS485 | VG200, VG250, ISO200F, ISO250F | ULVAC Co., Ltd. | 41 | 26 | 266 | Can be installed in all directions | 57 | Gas port adapter KF10 | 600L/min or more | 37,200 | AC connector/AC cable (5m/10m/15m/20m) | Unnecessary | Air supply port O-ring (VG only), exhaust port dust cap, remote control connector, instruction manual (CD-ROM) | 8 | None | 1×10-7 board | The operating speed can be changed between 25% and 100% of the specified pump speed. |
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UTM2300A |
Available upon quote | CE, TUVus | N2→1×10^8 or more, He→5×10^3, H2→9×10^2 | Integrated with the pump body (built into the bottom) | 1.2kVA | Single phase AC200V~240V±10% (50~60Hz ±2Hz) | Water cooling | 3~4 | 0.2~0.4 | KF40 | N2→2,100, Ar→2,000, H2→1,380 | D-sub 37 pin female contact input/output | D-sub9 pin male RS232C/RS485 | VG250, ISO250F | ULVAC Co., Ltd. | 56 | 4.5 | 200 | Can be installed in all directions | 60 | Gas port adapter KF10 | 1,500L/min or more | 33,700 | AC connector/AC cable (5m/10m/15m/20m) | Unnecessary | Air supply port O-ring (VG only), exhaust port dust cap, remote control connector, instruction manual (CD-ROM) | 9 | None | 1×10-7 board | The operating speed can be changed between 25% and 100% of the specified pump speed. |
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UTM3400A |
Available upon quote | CE, TUVus | N2→1×10^9 or more, He→1×10^5, H2→6×10^3 | Integrated with the pump body (built into the bottom) | 1.2kVA | Single phase AC200V~240V±10% (50~60Hz ±2Hz) | Water cooling | 3~4 | 0.2~0.4 | KF40 | N2→3,200, Ar→3,100, H2→2,100 | D-sub 37 pin female contact input/output | D-sub9 pin male RS232C/RS485 | VG300, VG350, ISO320F | ULVAC Co., Ltd. | 94 | 7 | 270 | Can be installed in all directions | 60 | Gas port adapter KF10 | 1,500L/min or more | 27,600 | AC connector/AC cable (5m/10m/15m/20m) | Unnecessary | Air supply port O-ring (VG only), exhaust port dust cap, remote control connector, instruction manual (CD-ROM) | 16 | None | 1×10-7 board | The operating speed can be changed between 25% and 100% of the specified pump speed. |
Click on the part number for more information about each product
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About Company Handling This Product
- Japan