Turbo molecular pump exhaust unit VPT-060
Sanko Ematech Co., Ltd.
About This Product
■Product description
A high-vacuum exhaust system that compactly includes necessary equipment such as a turbo molecular pump, dry vacuum pump, valve piping, and electrical system inside the base frame. Used in various fields such as semiconductors, analysis, inspection, physics and chemistry, and pharmaceuticals, providing a clean vacuum environment
■Options
Ionization vacuum gauge, Pirani vacuum gauge, piping parts *Caution: Performance may deteriorate depending on usage conditions.
■Features
Completely dry exhaust unit: Provides completely dry exhaust. This ensures a highly reliable vacuum environment. Compact installation space improves equipment space efficiency
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Product
Turbo molecular pump exhaust unit VPT-060
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Handling Company
Sanko Ematech Co., Ltd.
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Categories
1 Models of Turbo molecular pump exhaust unit VPT-060
| Product Image | Part Number | Price (excluding tax) | Auxiliary pump | Main pump | Manufacturer | Mass | Maximum dimensions | Required amount of electricity | RoHS compatible | Specification ambient temperature range | Suction/exhaust port | Ultimate pressure |
|---|---|---|---|---|---|---|---|---|---|---|---|---|
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VPT-060 |
Available upon quote | Diaphragm type dry vacuum pump 20L/min | Turbo molecular pump (air cooling) 60L/sec | ULVAC Kiko Co., Ltd. | 17 kg | 340 mm, length: 340 mm, height: 355 mm | Single phase/100V 0.3kVA | ○ | 8~38℃ | ISO63 (Option: KF-40) | 10-5Pa |
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About Company Handling This Product
- Japan