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  4. Photomask CO₂ dry cleaning equipment RAVE EL-C (Bruker Corporation)
Photomask CO₂ dry cleaning equipment RAVE EL-C-RAVE EL-C
Photomask CO₂ dry cleaning equipment RAVE EL-C-Bruker Corporation

Photomask CO₂ dry cleaning equipment RAVE EL-C
Bruker Corporation

About This Product

■CO₂ precision dry cleaning equipment for masks

・Removal of repair residue for photomasks and particles by dry cleaning ・Control particle re-adhesion by cleaning the mask vertically ・Supports cleaning of the front and back sides of the mask ・Using a unique nozzle, cleaning is possible without damaging cutting-edge patterns. ・Processing in a clean environment is possible with the SMIF pod load lock and ISO Class 3 level environmental preservation function inside the chamber.

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    Photomask CO₂ dry cleaning equipment RAVE EL-C

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1 Models of Photomask CO₂ dry cleaning equipment RAVE EL-C

Image Part Number Price (excluding tax)
Photomask CO₂ dry cleaning equipment RAVE EL-C-Part Number-RAVE EL-C

RAVE EL-C

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Bruker Corporation

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Bruker, founded in 1960 and based in Billerica, Massachusetts, is a manufacturer and distributor of scientific...

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