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  4. Automatic detection of notch and bevel defects X-ray topography equipment JV SENSUS (Bruker Corporation)
Automatic detection of notch and bevel defects X-ray topography equipment JV SENSUS-SENSUS CS
Automatic detection of notch and bevel defects X-ray topography equipment JV SENSUS-Bruker Corporation

Automatic detection of notch and bevel defects X-ray topography equipment JV SENSUS
Bruker Corporation

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About This Product

■X-ray topography equipment that automatically detects notch and bevel defects

Bruker JV Sensus is a fab X-ray topography system. With the recent increase in the number of processes that apply deep trench stress to silicon substrates, the need to measure invisible cracks that occur during the process has greatly increased. In particular, defects are likely to occur in non-uniform areas within the wafer such as notches and bevels, which can be analyzed using the zero edge exclusion measurement provided by this device. Since it uses X-rays, it can penetrate even metal patterns and make measurements. High throughput of 24 WPH is achievable with the high speed option (600f).

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    Automatic detection of notch and bevel defects X-ray topography equipment JV SENSUS

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1 Models of Automatic detection of notch and bevel defects X-ray topography equipment JV SENSUS

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Automatic detection of notch and bevel defects X-ray topography equipment JV SENSUS-Part Number-SENSUS CS

SENSUS CS

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Bruker Corporation

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Company Overview

Bruker, founded in 1960 and based in Billerica, Massachusetts, is a manufacturer and distributor of scientific...

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