Photomask AutoAFM (fully automated atomic force microscope) InSight AFP PM-Insight AFP PM
Photomask AutoAFM (fully automated atomic force microscope) InSight AFP PM-Bruker Corporation

Photomask AutoAFM (fully automated atomic force microscope) InSight AFP PM
Bruker Corporation


About This Product

■AutoAFM (fully automatic atomic force microscope) for photomasks Insight AFP PM is a fully automated atomic force microscope for photomasks. The basic functions are the same as Insight AFP, but the viscosity can be measured using Bruker's patented True Sense Mode at the same time as the surface shape, making it easy to determine whether defects on the mask surface are deposits or processing defects. It's possible. It also has a Defect Review function that obtains defect location information from the surface defect inspection device as a KLARF file and automatically performs AFM measurement.

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    Photomask AutoAFM (fully automated atomic force microscope) InSight AFP PM

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1 Models of Photomask AutoAFM (fully automated atomic force microscope) InSight AFP PM

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Photomask AutoAFM (fully automated atomic force microscope) InSight AFP PM-Part Number-Insight AFP PM

Insight AFP PM

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Bruker Corporation

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