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  4. AutoAFM (Automatic Atomic Force Profiler) InSight CAP (Bruker Corporation)
AutoAFM (Automatic Atomic Force Profiler) InSight CAP-InSight CAP
AutoAFM (Automatic Atomic Force Profiler) InSight CAP-Bruker Corporation

AutoAFM (Automatic Atomic Force Profiler) InSight CAP
Bruker Corporation

Bruker Corporation's Response Status

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Response Time

30.7hours

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About This Product

■AutoAFM (Fully automatic atomic force profiler)

Insight CAP is a fully automatic AFM for CMP and Etch process evaluation. In addition to the profiling function up to 100mm, it also supports roughness measurement unique to AFM and accurate depth measurement at narrow line widths of 65nm or less, which is difficult with regular AFM. In addition, it is compatible with 100mm, 150mm, 200mm, and 300mm wafers, and can be equipped with a maximum scan size of 130um, a 100um Z-direction scanner, automatic AFM probe exchange/probe tip shape evaluation function, and communication function with the host, allowing production line automation. We will fully support you.

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    AutoAFM (Automatic Atomic Force Profiler) InSight CAP

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1 Models of AutoAFM (Automatic Atomic Force Profiler) InSight CAP

Image Part Number Price (excluding tax)
AutoAFM (Automatic Atomic Force Profiler) InSight CAP-Part Number-InSight CAP

InSight CAP

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Bruker Corporation

Response Rate

100.0%

Response Time

30.7hrs

Company Overview

Bruker, founded in 1960 and based in Billerica, Massachusetts, is a manufacturer and distributor of scientific...

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