AutoAFM (Automatic Atomic Force Profiler) InSight CAP
Bruker Corporation
About This Product
■AutoAFM (Fully automatic atomic force profiler)
Insight CAP is a fully automatic AFM for CMP and Etch process evaluation. In addition to the profiling function up to 100mm, it also supports roughness measurement unique to AFM and accurate depth measurement at narrow line widths of 65nm or less, which is difficult with regular AFM.
In addition, it is compatible with 100mm, 150mm, 200mm, and 300mm wafers, and can be equipped with a maximum scan size of 130um, a 100um Z-direction scanner, automatic AFM probe exchange/probe tip shape evaluation function, and communication function with the host, allowing production line automation. We will fully support you.
-
Product
AutoAFM (Automatic Atomic Force Profiler) InSight CAP
-
Handling Company
Bruker Corporation
-
Categories
1 Models of AutoAFM (Automatic Atomic Force Profiler) InSight CAP
| Product Image | Part Number | Price (excluding tax) |
|---|---|---|
|
|
InSight CAP |
Available upon quote |
Customers who viewed this product also viewed
Other products of Bruker Corporation
View more products of Bruker Corporation
About Company Handling This Product
- United States of America