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  4. 300mm wafer compatible large AutoAFM (automated atomic force microscope) InSight AFP (Bruker Corporation)
300mm wafer compatible large AutoAFM (automated atomic force microscope) InSight AFP-InSight AFP
300mm wafer compatible large AutoAFM (automated atomic force microscope) InSight AFP-Bruker Corporation

300mm wafer compatible large AutoAFM (automated atomic force microscope) InSight AFP
Bruker Corporation

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About This Product

AutoAFM (large automatic atomic force microscope).

■Large AutoAFM (automatic atomic force microscope) compatible with 300mm wafers

InSight AFP AAFM supports 300mm wafers. It is possible to measure not only the depth but also the shape of the side wall, which allows you to measure Top/Mid/Bottom CD, SWA (Side Wall Angle), LWR/LER (Line Width Roughness/Line Edge Roughness), SWR (Side You can obtain various parameters such as Wall Roughness). With the latest hardware design and measurement algorithms, it is possible to handle line widths as narrow as 45 nm or less. In addition, since it does not irradiate laser, it can measure resist non-destructively, and it uses the NIST traceable CD/Depth standard, so it can be used as a new standard instead of TEM. This is an unprecedented AFM system for semiconductors.

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    300mm wafer compatible large AutoAFM (automated atomic force microscope) InSight AFP

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1 Models of 300mm wafer compatible large AutoAFM (automated atomic force microscope) InSight AFP

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300mm wafer compatible large AutoAFM (automated atomic force microscope) InSight AFP-Part Number-InSight AFP

InSight AFP

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Bruker Corporation

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Bruker, founded in 1960 and based in Billerica, Massachusetts, is a manufacturer and distributor of scientific...

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