300mm wafer compatible large AutoAFM (automated atomic force microscope) InSight AFP
Bruker Corporation
About This Product
AutoAFM (large automatic atomic force microscope).
■Large AutoAFM (automatic atomic force microscope) compatible with 300mm wafers
InSight AFP AAFM supports 300mm wafers. It is possible to measure not only the depth but also the shape of the side wall, which allows you to measure Top/Mid/Bottom CD, SWA (Side Wall Angle), LWR/LER (Line Width Roughness/Line Edge Roughness), SWR (Side You can obtain various parameters such as Wall Roughness). With the latest hardware design and measurement algorithms, it is possible to handle line widths as narrow as 45 nm or less.
In addition, since it does not irradiate laser, it can measure resist non-destructively, and it uses the NIST traceable CD/Depth standard, so it can be used as a new standard instead of TEM. This is an unprecedented AFM system for semiconductors.
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Product
300mm wafer compatible large AutoAFM (automated atomic force microscope) InSight AFP
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Handling Company
Bruker Corporation
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Categories
1 Models of 300mm wafer compatible large AutoAFM (automated atomic force microscope) InSight AFP
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InSight AFP |
Available upon quote |
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About Company Handling This Product
- United States of America