Dummy wafer-Dummy wafer
Dummy wafer-Toyominato Co., Ltd.

About This Product

Dummy wafers are also called test wafers, and unlike product wafers, they are mainly used for equipment experiments and inspections. It is widely used for operational tests of manufacturing equipment, transportation tests, and mechanical evaluations (cutting, scraping, polishing, etc.). ■Characteristics of dummy wafer Because they are often used in experiments and tests, they come in various sizes and thicknesses. Recycled wafers may also be used. Dummy wafers are also cheaper than particle-controlled silicon wafer products and can be shipped in small lots. In manufacturing equipment, the first few dummy wafers are introduced to improve process stability, and are used for optimization and monitoring of the manufacturing process. Although dummy wafers are not suitable for device manufacturing, they are suitable for monitoring and testing and are often used in place of new wafers. Dummy wafers are wafers that play an important role in testing and adjustment in all processes of wafer manufacturing.

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    Dummy wafer

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1 Models of Dummy wafer

Product Image Part Number Price (excluding tax) Crystal orientation Manufacturing method Notch/orientation flat direction Orientation flat or notch Packing form Particles Remarks Size (inc) Specific resistance (Ω・cm) Surface finish Thickness (μm) Thickness tolerance (μm) Type
Dummy wafer-Part Number-Dummy wafer

Dummy wafer

Available upon quote <100> / <111> / <110> / No question CZ/FZ <100> / <111> / <211> / No question Orientation flat, notch or orientation flat, notch Coin roll/cassette case No questions asked Both JEITA and SEMI are compatible with 6-inch orientation flat standards. 2,3,4,5,6,8,12 0.005~ / No question Single-sided mirror (MP/ET) / Double-sided etched (ET/ET)
Double-sided mirror (MP/MP)
280,380,525,625,625/675,725,775 20,25 P type / N type / Unspecified

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