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Frictionless, motorized A-63x PIglide RL air bearing flat rotary stage-A-634.A100
Frictionless, motorized A-63x PIglide RL air bearing flat rotary stage-PI Japan Co., Ltd.

Frictionless, motorized A-63x PIglide RL air bearing flat rotary stage
PI Japan Co., Ltd.

PI Japan Co., Ltd.'s Response Status

Response Rate

100.0%

Response Time

26.5hours

Relatively Fast Response


About This Product

■Features

・150mm, 200mm, 350mm ・Motion platform diameter ・Low profile ・Eccentricity and flatness <100nm ・Option of self-locking when stationary with magnetic preload

■Product overview

-PIglide RL series direct drive low profile rotary stages are designed for maximum precision in a low profile design. - Various options can be combined to create the perfect solution for point-to-point indexing or uniform speed scanning. ・The RL stage has excellent movement accuracy, flatness, and wobble performance.

■Absolute encoder (optional)

- Absolute encoders provide explicit position information allowing instant determination of position. -This means no reference is required during switch-on, increasing efficiency and safety during operation.

■Application field

Optical alignment, wafer inspection, wafer alignment, measurement technology, inspection systems, calibration, scanning. Thanks to its frictionless movement, no particles are formed, making the PIglide stage ideal for cleanroom applications.

■Three-phase torque motor

・Brushless ・Slotless ・Low cogging torque

■Accessories and options

・Incremental or absolute encoder ・Vacuum seal ・Self-locking when stationary due to magnetic preload ・Clear aperture on request ・PIglide filter and air preparation kit ・Single-axis or multi-axis motion controllers and servo drives ・Multi-axis/customized setup ・Granite base plate and vibration reduction system

  • Product

    Frictionless, motorized A-63x PIglide RL air bearing flat rotary stage

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6 Models of Frictionless, motorized A-63x PIglide RL air bearing flat rotary stage

Click on the part number for more information about each product

Image Part Number Price (excluding tax) Positioning accuracy at θZ, calibrated Clockwise peak torque at θZ Clockwise driving torque in θZ Mass moved by θZ, no load Linear crosstalk in X due to movement of θZ Linear crosstalk in Y due to movement of θZ Linear crosstalk in Z due to movement of θZ Rotational crosstalk of θX due to movement of θZ Rotational crosstalk of θY due to movement of θZ Bidirectional repeatability of θZ ΘZ counterclockwise peak torque Active axis Inductance between phases Sensor signal Sensor signal period / U Sensor resolution, rotation Torque constant Drive type Peak voltage Peak current, RMS Bearing type Nominal voltage Nominal current, RMS Rotation range θZ Reference switch Resistance between phases Maximum angular velocity (θZ, at no load) Integrated sensor Back emf, interphase, rotation Drive torque θZ counterclockwise
Frictionless, motorized A-63x PIglide RL air bearing flat rotary stage-Part Number-A-634.A100

A-634.A100

Available upon quote

±8μrad

4.7N・m

1.6N・m

1,900g

±0.1μm

±0.1μm

±0.038μm

±1μrad

±1μrad

±4μrad

4.7N・m

θZ

0.9mH

Sin/cos, 1V peak-peak

23600

0.06μrad

0.59N・m/A

Rebar-less three-phase torque motor

80V

6.9A

Air bearing with magnetic preload

48V

2.3A

360°

1 / revolution, differential pulse over one period of sensor signal, 1V peak-peak

6.7Ω

500 minutes^-1

Incremental angle measurement system

71V/kRPM

1.6N・m

Frictionless, motorized A-63x PIglide RL air bearing flat rotary stage-Part Number-A-634.B100

A-634.B100

Available upon quote

±8μrad

4.7N・m

1.6N・m

1,900g

±0.1μm

±0.1μm

±0.038μm

±1μrad

±1μrad

±4μrad

4.7N・m

θZ

0.9mH

BiSS-C

-

0.0015μrad

0.59N・m/A

Rebar-less three-phase torque motor

80V

6.9A

Air bearing with magnetic preload

48V

2.3A

360°

-

6.7Ω

500 minutes^-1

Absolute angle measurement system

71V/kRPM

1.6N・m

Frictionless, motorized A-63x PIglide RL air bearing flat rotary stage-Part Number-A-635.A100

A-635.A100

Available upon quote

±8μrad

8.5N・m

2.8N・m

3,600g

±0.075μm

±0.075μm

±0.038μm

±1μrad

±1μrad

±4μrad

8.5N・m

θZ

0.6mH

Sin/cos, 1V peak-peak

31488

0.05μrad

0.66N・m/A

Rebar-less three-phase torque motor

80V

13.9A

Air bearing with magnetic preload

48V

4.5A

360°

1 / revolution, differential pulse over one period of sensor signal, 1V peak-peak

4.5Ω

500 minutes^-1

Incremental angle measurement system

80V/kRPM

2.8N・m

Frictionless, motorized A-63x PIglide RL air bearing flat rotary stage-Part Number-A-635.B100

A-635.B100

Available upon quote

±8μrad

8.5N・m

2.8N・m

3,600g

±0.075μm

±0.075μm

±0.038μm

±1μrad

±1μrad

±4μrad

8.5N・m

θZ

0.6mH

BiSS-C

-

0.0015μrad

0.66N・m/A

Rebar-less three-phase torque motor

80V

13.9A

Air bearing with magnetic preload

48V

4.5A

360°

-

4.5Ω

500 minutes^-1

Absolute angle measurement system

80V/kRPM

2.8N・m

Frictionless, motorized A-63x PIglide RL air bearing flat rotary stage-Part Number-A-638.A100

A-638.A100

Available upon quote

±8μrad

8.5N・m

2.8N・m

11,000g

±0.005μm

±0.005μm

±0.025μm

±0.5μrad

±0.5μrad

±4μrad

8.5N・m

θZ

0.6mH

Sin/cos, 1V peak-peak

31488

0.05μrad

0.66N・m/A

Rebar-less three-phase torque motor

80V

13.9A

Air bearing with magnetic preload

48V

4.5A

360°

1 / revolution, differential pulse over one period of sensor signal, 1V peak-peak

4.5Ω

500 minutes^-1

Incremental angle measurement system

80V/kRPM

2.8N・m

Frictionless, motorized A-63x PIglide RL air bearing flat rotary stage-Part Number-A-638.B100

A-638.B100

Available upon quote

±8μrad

8.5N・m

2.8N・m

11,000g

±0.005μm

±0.005μm

±0.025μm

±0.5μrad

±0.5μrad

±4μrad

8.5N・m

θZ

0.6mH

BiSS-C

-

0.0015μrad

0.66N・m/A

Rebar-less three-phase torque motor

80V

13.9A

Air bearing with magnetic preload

48V

4.5A

360°

-

4.5Ω

500 minutes^-1

Absolute angle measurement system

80V/kRPM

2.8N・m

Click on the part number for more information about each product

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About Company Handling This Product

Response Rate

100.0%


Response Time

26.5hrs

  • Japan

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