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High movement accuracy L-611 V6/V7/V9 Vacuum compatible precision rotary stage-L-611.991200V6
High movement accuracy L-611 V6/V7/V9 Vacuum compatible precision rotary stage-PI Japan Co., Ltd.

High movement accuracy L-611 V6/V7/V9 Vacuum compatible precision rotary stage
PI Japan Co., Ltd.

PI Japan Co., Ltd.'s Response Status

Response Rate

100.0%

Response Time

26.5hours

Relatively Fast Response


About This Product

■Features

・Vacuum compatible up to 10 -9hPa ・Unlimited driving range ・Very high resolution ・Stepping motor ・Direction sensing reference switch ・Multi-axis setup possible

■Reference class rotating stage

・Highly accurate positioning is possible by using a preloaded worm gear with little play. ・Preloaded pivot bearing for high movement accuracy. ・35mmØ clear opening. - Unlimited movement range in both rotational directions. ・Reference switch.

■Reduced outgassing especially for use in vacuum environments

Most notable is the use of materials with particularly low outgassing for guide and spindle lubrication. This allows bakeout temperatures of up to 80°C. -This and other changes in the PI V6 vacuum class allow this positioner to be used up to 10-6hPa.

■High quality for high vacuum applications

In this case, special components suitable for high vacuum are used, such as motors, measuring systems and limit switches. Additionally, the surface is made of uncoated aluminum, and the spindle and guide are made of stainless steel. This reaches the PI V7 vacuum class, i.e. up to 10-7 hPa.

■Providing the highest quality for special requirements in ultra-high vacuum

- In this vacuum class, the product has been optimized in every detail thanks to components suitable for ultra-high vacuums in order to achieve the PI V9 vacuum class of up to 10-9hPa. - Among other things, only selected types of plastics are used for this purpose and bakeout temperatures of 120 °C with and 150 °C without measuring system apply.

■Option: Movement accuracy/positioning accuracy measurement

Separate measurement logs for wobble, axial and radial creep are available on request.

■Application field

Assembly and inspection of vacuum chambers, research, beam line equipment, microscopy inspection, and electronic equipment

  • Product

    High movement accuracy L-611 V6/V7/V9 Vacuum compatible precision rotary stage

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3 Models of High movement accuracy L-611 V6/V7/V9 Vacuum compatible precision rotary stage

Click on the part number for more information about each product

Image Part Number Price (excluding tax) Allowable pressing force in the X direction Allowable pressing force in Y direction Mass moved by θZ, no load Unidirectional repeatability in θZ Linear crosstalk in X due to movement of θZ Linear crosstalk in Y due to movement of θZ Linear crosstalk in Z due to movement of θZ Rotational crosstalk of θX due to movement of θZ Rotational crosstalk of θY due to movement of θZ Bidirectional repeatability of θZ Minimum incremental movement of θZ Active axis Inductance between phases Worm gear reducer Connector Drive type Peak voltage Bearing type Motor resolution Operating temperature range Nominal voltage Nominal current, RMS Rotation range θZ Reference switch Moment of inertia (θZ, no load) Resistance between phases Recommended controller/driver Maximum angular velocity (θZ, at no load) Vacuum class Cable length
High movement accuracy L-611 V6/V7/V9 Vacuum compatible precision rotary stage-Part Number-L-611.991200V6

L-611.991200V6

Available upon quote

50N

50N

1,100g

20μrad

±2.5μm

±2.5μm

±1μm

±15μrad

±15μrad

±175μrad

8.72μrad

θZ

2.8mH

90:1

HD D-sub 26 pin (male)

2 phase stepper motor

48V

ball bearing

200 full steps/rotation

5~40℃

24V

1.2A

360°

Hall effect, N/C contact, 5V, NPN

770kg・mm²

3.3Ω

C-663.12
C-885 and C-663.12C885
ACS modular controller

20°/sec

10^-6hPa

-
High movement accuracy L-611 V6/V7/V9 Vacuum compatible precision rotary stage-Part Number-L-611.991300V7

L-611.991300V7

Available upon quote

50N

50N

1,100g

20μrad

±2.5μm

±2.5μm

±1μm

±15μrad

±15μrad

±175μrad

8.72μrad

θZ

2.8mH

90:1

D-sub15 pole (female)

2 phase stepper motor

48V

ball bearing

200 full steps/rotation

5~40℃

24V

1.2A

360°

Hall effect, N/C contact, 5V, NPN

770kg・mm²

3.3Ω

C-663.12
C-885 and C-663.12C885
ACS modular controller

20°/sec

10^-7hPa

2m

High movement accuracy L-611 V6/V7/V9 Vacuum compatible precision rotary stage-Part Number-L-611.991600V9

L-611.991600V9

Available upon quote

50N

50N

1,100g

20μrad

±2.5μm

±2.5μm

±1μm

±15μrad

±15μrad

±175μrad

8.72μrad

θZ

2.8mH

90:1

D-sub15 pole (female)

2 phase stepper motor

48V

ball bearing

200 full steps/rotation

5~40℃

24V

1.2A

360°

Hall effect, N/C contact, 5V, NPN

770kg・mm²

3.3Ω

C-663.12
C-885 and C-663.12C885
ACS modular controller

20°/sec

10^-9 hPa

2m

Click on the part number for more information about each product

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About Company Handling This Product

Response Rate

100.0%


Response Time

26.5hrs

  • Japan

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