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A-68x Air Bearing Motor Rotating Stage-A-688.A100
A-68x Air Bearing Motor Rotating Stage-PI Japan Co., Ltd.

A-68x Air Bearing Motor Rotating Stage
PI Japan Co., Ltd.

PI Japan Co., Ltd.'s Response Status

Response Rate

100.0%

Response Time

26.5hours

Relatively Fast Response


About This Product

Friction-free, motorized. The PIglide RLA series direct drive flat rotary stages are designed for maximum precision. They have a low profile and a large clear aperture. RLA stages offer excellent travel accuracy, flatness, and wobble performance.

■Features

・365mm diameter motion platform, 260mm diameter opening ・Low profile ・Eccentricity and flatness < 300 nm overview

■3-phase torque motor

Brushless/low cogging torque

■Absolute encoder (optional)

Absolute encoders provide explicit position information that allows instant determination of position. This means that no reference is required during switch-on, increasing efficiency and safety during operation.

■Application field

Tomography, beamline systems, wafer metrology, wafer inspection, measurement technology, inspection systems, calibration, scanning. Frictionless motion means no particles are formed, making the PIglide stage ideal for cleanroom applications.

■Accessories and options

Incremental or absolute encoder / PIglide filter and air preparation kit / Single or multi-axis motion controller and servo drive / Multi-axis / Customized setup / Granite base plate and system to reduce vibrations

  • Product

    A-68x Air Bearing Motor Rotating Stage

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2 Models of A-68x Air Bearing Motor Rotating Stage

Click on the part number for more information about each product

Image Part Number Price (excluding tax) Wobble (μrad) Inductance phase (mH) Type of guide Sensor signal Torque constant (Nm/A) Drive type Peak torque (Nm) Peak current (A) Motion platform diameter (mm) Line/rotation Intermediate circuit voltage (V DC) Working pressure Paranoia (nm) Overall mass (kg) Nominal torque (Nm) Nominal current (A) Air quality Flat (nm) Moment of inertia (kg·mm²) Resistance phase (Ω) Material Movement range Moving mass (kg) Air consumption Integrated sensor Load capacity, radial (N) Load torque, MX,Y (Nm) Load capacity, axial (N) Back emf phase (V/kRPM) Speed
A-68x Air Bearing Motor Rotating Stage-Part Number-A-688.A100

A-688.A100

Available upon quote

1

1.24

air bearing

Sin/cos, 1 V peak-peak

12.3

Torque motor, three-phase, brushless

85

6.9

365

55,040

48, nominal up to 80

75~85psi (515~585kPa)

300

twenty four

39

3.2

Clean (filtered to >1.0 μm) - ISO 8573-1 Class 1
Oil-free - ISO 8573-1 Class 1
Dry (-15°C dew point) - ISO 8573-1 Class 3

175

284,710

3.6

Hard coat aluminum, stainless steel mounting hardware

Unlimited, >360°

12

<2SCFM (56 SLPM)

Incremental angle measurement system

190

36

770

10.1

500 rpm max.

A-68x Air Bearing Motor Rotating Stage-Part Number-A-688.B100

A-688.B100

Available upon quote

1

1.24

air bearing

BiSS-C

12.3

Torque motor, three-phase, brushless

85

6.9

365

-

48, nominal up to 80

75~85psi (515~585kPa)

300

twenty four

39

3.2

Clean (filtered to >1.0 μm) - ISO 8573-1 Class 1
Oil-free - ISO 8573-1 Class 1
Dry (-15°C dew point) - ISO 8573-1 Class 3

175

284,710

3.6

Hard coat aluminum, stainless steel mounting hardware

Unlimited, >360°

12

<2SCFM (56 SLPM)

Absolute angle measurement system

190

36

770

10.1

500 rpm max.

Click on the part number for more information about each product

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About Company Handling This Product

Response Rate

100.0%


Response Time

26.5hrs

  • Japan

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