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A-62x Air Bearing Rotation Stage-A-621.025A1
A-62x Air Bearing Rotation Stage-PI Japan Co., Ltd.

A-62x Air Bearing Rotation Stage
PI Japan Co., Ltd.

PI Japan Co., Ltd.'s Response Status

Response Rate

100.0%

Response Time

26.5hours

Relatively Fast Response


About This Product

Frictionless, ideal for indexing, positioning, scanning and measuring techniques. PIglide RM series motorized rotary stages are designed for accuracy, precision, high rigidity, and ease of use and can be mounted in any orientation. Various options can be combined to create the perfect solution for point-to-point indexing and uniform speed scanning. RM stages offer excellent travel accuracy, flatness, and wobble performance. It is frictionless and requires no maintenance or lubrication, making it ideal for use in clean rooms.

■Features

・Clean room compatible ・Motion platform diameter from 50mm to 300mm ・Load capacity up to 4,170 N ・Eccentricity and flatness < 200 nm -Can be mounted vertically or horizontally overview

■3-phase torque motor

Brushless/Slotless/Low cogging torque/

■Absolute encoder (optional)

Absolute encoders provide explicit position information that allows instant determination of position. Therefore, there is no need to refer to it when switching on, increasing efficiency and safety during operation.

■Accessories and options

Encoder / Optional chip / Tilt platform / Custom mounting flange / Vacuum feedthrough / Slip ring / PIglide filter and air preparation kit / Single or multi-axis motion controller and servo drive / Granite base plate and system to reduce vibration

■Application field

Optical alignment, metrology, inspection systems, calibration, and scanning. *Other model numbers are available.

  • Product

    A-62x Air Bearing Rotation Stage

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10 Models of A-62x Air Bearing Rotation Stage

Click on the part number for more information about each product

Image Part Number Price (excluding tax) Linear crosstalk in X and motion in θZ Linear crosstalk in Y and motion in θZ Linear crosstalk in Z and motion in θZ Rotational crosstalk in θX and motion in θZ Rotational crosstalk in θY and motion in θZ Bidirectional reproducibility at θZ Counterclockwise peak torque at θZ Rotation range in θZ units Active axis Inductance phase Sensor signal Sensor signal period / U Sensor resolution, rotary Sensor resolution Drive torque clockwise with θZ Torque constant Drive type Peak voltage Peak current, effective value Positioning accuracy (θZ unit, calibrated) Nominal voltage Nominal current, effective value Reference switch Resistance phase Clockwise peak torque (θZ) Number of pole pairs Maximum angular velocity without load (θZ) Integrated sensor Back emf, phase, rotation The driving torque is θZ counterclockwise.
A-62x Air Bearing Rotation Stage-Part Number-A-621.025A1

A-621.025A1

Available upon quote

± 0.15 µm

± 0.15 µm

± 0.05 µm

± 2.5 µrad

± 2.5 µrad

± 4 µrad

0.21 N m

360°

θZ

0.1 mH

Sin/cos, 1 V peak-peak

8,192

0.047 μrad

0.047nm

0.07 N m

0.03 N m/A

Ironless 3-phase torque motor

80V

9.9A

±8 µrad

48V

3.3A

1/rotation, 1 step of the encoder is 1 count, synchronized to the output signal

2.7Ω

0.21 N m

6

2,500 min⁻¹

Incremental angle measurement system

4.1V/kRPM

0.07 N m

A-62x Air Bearing Rotation Stage-Part Number-A-621.025B1

A-621.025B1

Available upon quote

± 0.15 µm

± 0.15 µm

± 0.05 µm

± 2.5 µrad

± 2.5 µrad

± 4 µrad

0.21 N m

360°

θZ

0.1 mH

BiSS-C

-

0.0015 μrad

0.015nm

0.07 N m

0.03 N m/A

Ironless 3-phase torque motor

80V

9.9A

±8 µrad

48V

3.3A

-

2.7Ω

0.21 N m

6

2,500 min⁻¹

Absolute angle measurement system

4.1V/kRPM

0.07 N m

A-62x Air Bearing Rotation Stage-Part Number-A-623.025A1

A-623.025A1

Available upon quote

± 0.087 µm

± 0.087 µm

± 0.037 µm

± 1.5 µrad

± 1.5 µrad

± 4 µrad

2.1 N m

360°

θZ

0.4mH

Sin/cos, 1 V peak-peak

15,744

0.024 μrad

0.024nm

0.7 N m

0.26 N m/A

Ironless 3-phase torque motor

80V

9.3A

±8 µrad

48V

3.1A

1/rotation, 1 step of the encoder is 1 count, synchronized to the output signal

4.2Ω

2.1 N m

14

1,200 min⁻¹

Incremental angle measurement system

31.8V/kRPM

0.7 N m

A-62x Air Bearing Rotation Stage-Part Number-A-623.025B1

A-623.025B1

Available upon quote

± 0.087 µm

± 0.087 µm

± 0.037 µm

± 1.5 µrad

± 1.5 µrad

± 4 µrad

2.1 N m

360°

θZ

0.4mH

BiSS-C

-

0.0015 μrad

0.015nm

0.7 N m

0.26 N m/A

Ironless 3-phase torque motor

80V

9.3A

±8 µrad

48V

3.1A

-

4.2Ω

2.1 N m

14

1,200 min⁻¹

Absolute angle measurement system

31.8V/kRPM

0.7 N m

A-62x Air Bearing Rotation Stage-Part Number-A-623.050A1

A-623.050A1

Available upon quote

± 0.087 µm

± 0.087 µm

± 0.037 µm

± 1.5 µrad

± 1.5 µrad

± 4 µrad

2.1 N m

360°

θZ

0.4mH

Sin/cos, 1 V peak-peak

15,744

0.016 μrad

0.024nm

0.7 N m

0.26 N m/A

Ironless 3-phase torque motor

80V

9.3A

±8 µrad

48V

3.1A

1/rotation, 1 step of the encoder is 1 count, synchronized to the output signal

4.2Ω

2.1 N m

14

1,200 min⁻¹

Incremental angle measurement system

31.8V/kRPM

0.7 N m

A-62x Air Bearing Rotation Stage-Part Number-A-623.050B1

A-623.050B1

Available upon quote

± 0.087 µm

± 0.087 µm

± 0.037 µm

± 1.5 µrad

± 1.5 µrad

± 4 µrad

2.1 N m

360°

θZ

0.4mH

BiSS-C

-

0.0015 μrad

0.015nm

0.7 N m

0.26 N m/A

Ironless 3-phase torque motor

80V

9.3A

±8 µrad

48V

3.1A

-

4.2Ω

2.1 N m

14

1,200 min⁻¹

Absolute angle measurement system

31.8V/kRPM

0.7 N m

A-62x Air Bearing Rotation Stage-Part Number-A-624.050A1

A-624.050A1

Available upon quote

± 0.05 µm

± 0.05 µm

± 0.025 µm

± 1 µrad

± 1 µrad

± 4 µrad

4.71 N m

360°

θZ

0.9 mH

Sin/cos, 1 V peak-peak

23,600

0.016 μrad

0.016nm

1.57 N m

0.59 N m/A

Ironless 3-phase torque motor

80V

6.9A

±8 µrad

48V

2.3A

1/rotation, 1 step of the encoder is 1 count, synchronized to the output signal

6.7Ω

4.71 N m

twenty four

600 min⁻¹

Incremental angle measurement system

71V/kRPM

1.57 N m

A-62x Air Bearing Rotation Stage-Part Number-A-624.050B1

A-624.050B1

Available upon quote

± 0.05 µm

± 0.05 µm

± 0.025 µm

± 1 µrad

± 1 µrad

± 4 µrad

4.71 N m

360°

θZ

0.9 mH

BiSS-C

-

0.0015 μrad

0.015nm

1.57 N m

0.59 N m/A

Ironless 3-phase torque motor

80V

6.9A

±8 µrad

48V

2.3A

-

6.7Ω

4.71 N m

twenty four

600 min⁻¹

Absolute angle measurement system

71V/kRPM

1.57 N m

A-62x Air Bearing Rotation Stage-Part Number-A-625.065A1

A-625.065A1

Available upon quote

± 0.05 µm

± 0.05 µm

± 0.025 µm

± 1 µrad

± 1 µrad

± 4 µrad

4.71 N m

360°

θZ

0.9 mH

Sin/cos, 1 V peak-peak

31,488

0.012 μrad

0.012nm

1.57 N m

0.59 N m/A

Ironless 3-phase torque motor

80V

6.9A

±8 µrad

48V

2.3A

1/rotation, 1 step of the encoder is 1 count, synchronized to the output signal

6.7Ω

4.71 N m

twenty four

500 min⁻¹

Incremental angle measurement system

71V/kRPM

1.57 N m

A-62x Air Bearing Rotation Stage-Part Number-A-625.065B1

A-625.065B1

Available upon quote

± 0.05 µm

± 0.05 µm

± 0.025 µm

± 1 µrad

± 1 µrad

± 4 µrad

4.71 N m

360°

θZ

0.9 mH

BiSS-C

-

0.0015 μrad

0.015nm

1.57 N m

0.59 N m/A

Ironless 3-phase torque motor

80V

6.9A

±8 µrad

48V

2.3A

1/rotation, 1 step of the encoder is 1 count, synchronized to the output signal

6.7Ω

4.71 N m

twenty four

500 min⁻¹

Absolute angle measurement system

71V/kRPM

1.57 N m

Click on the part number for more information about each product

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About Company Handling This Product

Response Rate

100.0%


Response Time

26.5hrs

  • Japan

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