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High -performance linear stage achieves a high -performance linear stage by fusion with servo control technology high accuracy τ Linear XY stage rating rating 68N type-NST-D10B3APNA
High -performance linear stage achieves a high -performance linear stage by fusion with servo control technology high accuracy τ Linear XY stage rating rating 68N type-CKD Nisshin Electrical Corporation Co., Ltd.

High -performance linear stage achieves a high -performance linear stage by fusion with servo control technology high accuracy τ Linear XY stage rating rating 68N type
CKD Nisshin Electrical Corporation Co., Ltd.

CKD Nisshin Electrical Corporation Co., Ltd.'s Response Status

Response Rate

100.0%

Response Time

4.0hours

Very Fast Response


About This Product

Realize the control stage by fusion with high -precision stage servo control technology equipped with a linear servo motor

■ High performance guarantee (optional)

・ Velcity fluctuation rate performance guarantee ・ Confirmation and setting of customer request operation specifications, such as checking high tact operation by setting the resonance filter ・ Positioning accuracy guarantee using laser measurement correction data

■ Abundant lineup

・ Standard lineup of X/XY stage ・ It is also possible to build a xθ/xyθ stage with a direct drive motor τdisc as a θ axis.

■ High quality ~ Enhanced measurement environment system

・ Measurement room: Floor removal structure/ constant greenhouse: 22 ° C ± 0.5 ℃ ・ 3D measuring instrument: Made by Tokyo Precision Society ・ Laser measuring instrument: Made by Renish Show

■ Stage model

There is also a jabbar.

■ Common specifications

Installation location: Do not install in a harmful atmosphere such as corrosion gas, grinding oil, metal powder, and oil. * There are other part numbers.

  • Product

    High -performance linear stage achieves a high -performance linear stage by fusion with servo control technology high accuracy τ Linear XY stage rating rating 68N type

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10 Models of High -performance linear stage achieves a high -performance linear stage by fusion with servo control technology high accuracy τ Linear XY stage rating rating 68N type

Click on the part number for more information about each product

Image Part Number Price (excluding tax) Encoder type Stage valid stroke MM Lost motion (encoder resolution) μm Movable part mass x/y (kg) Repeated positioning accuracy (encoder resolution) μm Power supply ACV Method detection method mass Mounting direction Peripheral conditions Peripheral conditions humidity Viper conditions elevation Immediate direct A Combinated driver Load -bearing Rect angle a Mounting linear servo motor maximum thrust x/y (n) Liner servo motor rating ratio X/Y (N) Beauty table Beauty base Parallel degree B Cooling method θ -axis option
High -performance linear stage achieves a high -performance linear stage by fusion with servo control technology high accuracy τ Linear XY stage rating rating 68N type-Part Number-NST-D10B3APNA

NST-D10B3APNA

Available upon quote

Absolute Encoda Renici RESOLUTE, Incrimental Encoda Reni Show Tonic

100 (130)

10 (at 5 μm) /2 (at 1 μm) /1 (0.5 μm or less)

32.5/7

± 5 (at 5 μm) /± 1 (at 1 μm) /±0.5 (time 0.5 μm or less)

200

Absolute: Absolute position detection/Incremental: Magnetic pole sensor detection

69.5

Table horizontal upwards, horizontally descending

22 ℃ ± 2 ℃

85%or less without condensation

1,000m or less

3

VPH series, VCⅡ series/VPH series

50

3

450/204

150/68

Mainly black and low -temperature black chromium processing

Mainly black and low -temperature black chromium processing

15

Natural air cooling

θ -axis direct drive motor, cable carrier selection, relay cable long selection, positioning accuracy calibration system

High -performance linear stage achieves a high -performance linear stage by fusion with servo control technology high accuracy τ Linear XY stage rating rating 68N type-Part Number-NST-D10A3APNA

NST-D10A3APNA

Available upon quote

Absolute Encoda Renici RESOLUTE, Incrimental Encoda Reni Show Tonic

100 (130)

10 (at 5 μm) /2 (at 1 μm) /1 (0.5 μm or less)

32.5/7

± 5 (at 5 μm) /± 1 (at 1 μm) /±0.5 (time 0.5 μm or less)

200

Absolute: Absolute position detection/Incremental: Magnetic pole sensor detection

69.5

Table horizontal upwards, horizontally descending

22 ℃ ± 2 ℃

85%or less without condensation

1,000m or less

3

VPH series, VCⅡ series/VPH series

50

3

450/204

150/68

Mainly black and low -temperature black chromium processing

Mainly black and low -temperature black chromium processing

15

Natural air cooling

θ -axis direct drive motor, cable carrier selection, relay cable long selection, positioning accuracy calibration system

High -performance linear stage achieves a high -performance linear stage by fusion with servo control technology high accuracy τ Linear XY stage rating rating 68N type-Part Number-NST-D20B3APNA

NST-D20B3APNA

Available upon quote

Absolute Encoda Renici RESOLUTE, Incrimental Encoda Reni Show Tonic

200 (230)

10 (at 5 μm) /2 (at 1 μm) /1 (0.5 μm or less)

37.5/7

± 5 (at 5 μm) /± 1 (at 1 μm) /±0.5 (time 0.5 μm or less)

200

Absolute: Absolute position detection/Incremental: Magnetic pole sensor detection

81.5

Table horizontal upwards, horizontally descending

22 ℃ ± 2 ℃

85%or less without condensation

1,000m or less

3

VPH series, VCⅡ series/VPH series

50

3

450/204

150/68

Mainly black and low -temperature black chromium processing

Mainly black and low -temperature black chromium processing

15

Natural air cooling

θ -axis direct drive motor, cable carrier selection, relay cable long selection, positioning accuracy calibration system

High -performance linear stage achieves a high -performance linear stage by fusion with servo control technology high accuracy τ Linear XY stage rating rating 68N type-Part Number-NST-D20A3APNA

NST-D20A3APNA

Available upon quote

Absolute Encoda Renici RESOLUTE, Incrimental Encoda Reni Show Tonic

200 (230)

10 (at 5 μm) /2 (at 1 μm) /1 (0.5 μm or less)

37.5/7

± 5 (at 5 μm) /± 1 (at 1 μm) /±0.5 (time 0.5 μm or less)

200

Absolute: Absolute position detection/Incremental: Magnetic pole sensor detection

81.5

Table horizontal upwards, horizontally descending

22 ℃ ± 2 ℃

85%or less without condensation

1,000m or less

3

VPH series, VCⅡ series/VPH series

50

3

450/204

150/68

Mainly black and low -temperature black chromium processing

Mainly black and low -temperature black chromium processing

15

Natural air cooling

θ -axis direct drive motor, cable carrier selection, relay cable long selection, positioning accuracy calibration system

High -performance linear stage achieves a high -performance linear stage by fusion with servo control technology high accuracy τ Linear XY stage rating rating 68N type-Part Number-NST-D30B4APNA

NST-D30B4APNA

Available upon quote

Absolute Encoda Renici RESOLUTE, Incrimental Encoda Reni Show Tonic

250 (280)

10 (at 5 μm) /2 (at 1 μm) /1 (0.5 μm or less)

54/9

± 5 (at 5 μm) /± 1 (at 1 μm) /±0.5 (time 0.5 μm or less)

200

Absolute: Absolute position detection/Incremental: Magnetic pole sensor detection

145.5

Table horizontal upwards, horizontally descending

22 ℃ ± 2 ℃

85%or less without condensation

1,000m or less

Five

VPH series, VCⅡ series/VPH series

100

Five

600/261

200/90

Mainly black and low -temperature black chromium processing

Mainly black and low -temperature black chromium processing

15

Natural air cooling

θ -axis direct drive motor, cable carrier selection, relay cable long selection, positioning accuracy calibration system

High -performance linear stage achieves a high -performance linear stage by fusion with servo control technology high accuracy τ Linear XY stage rating rating 68N type-Part Number-NST-D30A4APNA

NST-D30A4APNA

Available upon quote

Absolute Encoda Renici RESOLUTE, Incrimental Encoda Reni Show Tonic

250 (280)

10 (at 5 μm) /2 (at 1 μm) /1 (0.5 μm or less)

54/9

± 5 (at 5 μm) /± 1 (at 1 μm) /±0.5 (time 0.5 μm or less)

200

Absolute: Absolute position detection/Incremental: Magnetic pole sensor detection

145.5

Table horizontal upwards, horizontally descending

22 ℃ ± 2 ℃

85%or less without condensation

1,000m or less

Five

VPH series, VCⅡ series/VPH series

100

Five

600/261

200/90

Mainly black and low -temperature black chromium processing

Mainly black and low -temperature black chromium processing

15

Natural air cooling

θ -axis direct drive motor, cable carrier selection, relay cable long selection, positioning accuracy calibration system

High -performance linear stage achieves a high -performance linear stage by fusion with servo control technology high accuracy τ Linear XY stage rating rating 68N type-Part Number-NST-D35B4APNA

NST-D35B4APNA

Available upon quote

Absolute Encoda Renici RESOLUTE, Incrimental Encoda Reni Show Tonic

300 (330)

10 (at 5 μm) /2 (at 1 μm) /1 (0.5 μm or less)

57/9

± 5 (at 5 μm) /± 1 (at 1 μm) /±0.5 (time 0.5 μm or less)

200

Absolute: Absolute position detection/Incremental: Magnetic pole sensor detection

156

Table horizontal upwards, horizontally descending

22 ℃ ± 2 ℃

85%or less without condensation

1,000m or less

Five

VPH series, VCⅡ series/VPH series

100

Five

600/261

200/90

Mainly black and low -temperature black chromium processing

Mainly black and low -temperature black chromium processing

15

Natural air cooling

θ -axis direct drive motor, cable carrier selection, relay cable long selection, positioning accuracy calibration system

High -performance linear stage achieves a high -performance linear stage by fusion with servo control technology high accuracy τ Linear XY stage rating rating 68N type-Part Number-NST-D35A4APNA

NST-D35A4APNA

Available upon quote

Absolute Encoda Renici RESOLUTE, Incrimental Encoda Reni Show Tonic

300 (330)

10 (at 5 μm) /2 (at 1 μm) /1 (0.5 μm or less)

57/9

± 5 (at 5 μm) /± 1 (at 1 μm) /±0.5 (time 0.5 μm or less)

200

Absolute: Absolute position detection/Incremental: Magnetic pole sensor detection

156

Table horizontal upwards, horizontally descending

22 ℃ ± 2 ℃

85%or less without condensation

1,000m or less

Five

VPH series, VCⅡ series/VPH series

100

Five

600/261

200/90

Mainly black and low -temperature black chromium processing

Mainly black and low -temperature black chromium processing

15

Natural air cooling

θ -axis direct drive motor, cable carrier selection, relay cable long selection, positioning accuracy calibration system

High -performance linear stage achieves a high -performance linear stage by fusion with servo control technology high accuracy τ Linear XY stage rating rating 68N type-Part Number-NST-D50B5APNA

NST-D50B5APNA

Available upon quote

Absolute Encoda Renici RESOLUTE, Incrimental Encoda Reni Show Tonic

350 (380)

10 (at 5 μm) /2 (at 1 μm) /1 (0.5 μm or less)

60.5/9

± 5 (at 5 μm) /± 1 (at 1 μm) /±0.5 (time 0.5 μm or less)

200

Absolute: Absolute position detection/Incremental: Magnetic pole sensor detection

167.5

Table horizontal upwards, horizontally descending

22 ℃ ± 2 ℃

85%or less without condensation

1,000m or less

Five

VPH series, VCⅡ series/VPH series

100

Five

600/261

200/90

Mainly black and low -temperature black chromium processing

Mainly black and low -temperature black chromium processing

15

Natural air cooling

θ -axis direct drive motor, cable carrier selection, relay cable long selection, positioning accuracy calibration system

High -performance linear stage achieves a high -performance linear stage by fusion with servo control technology high accuracy τ Linear XY stage rating rating 68N type-Part Number-NST-D40A5APNA

NST-D40A5APNA

Available upon quote

Absolute Encoda Renici RESOLUTE, Incrimental Encoda Reni Show Tonic

350 (380)

10 (at 5 μm) /2 (at 1 μm) /1 (0.5 μm or less)

60.5/9

± 5 (at 5 μm) /± 1 (at 1 μm) /±0.5 (time 0.5 μm or less)

200

Absolute: Absolute position detection/Incremental: Magnetic pole sensor detection

167.5

Table horizontal upwards, horizontally descending

22 ℃ ± 2 ℃

85%or less without condensation

1,000m or less

Five

VPH series, VCⅡ series/VPH series

100

Five

600/261

200/90

Mainly black and low -temperature black chromium processing

Mainly black and low -temperature black chromium processing

15

Natural air cooling

θ -axis direct drive motor, cable carrier selection, relay cable long selection, positioning accuracy calibration system

Click on the part number for more information about each product

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