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  4. High temperature CVD equipment All-in-one CVD equipment (Epiquest Co., Ltd.)
High temperature CVD equipment All-in-one CVD equipment-All-in-one CVD equipment
High temperature CVD equipment All-in-one CVD equipment-Epiquest Co., Ltd.

High temperature CVD equipment All-in-one CVD equipment
Epiquest Co., Ltd.

About This Product

This device is an all-in-one CVD device with a process unit, gas control, cylinder cabinet, and electrical control section installed in a 1.3m x 1.3m footprint.

  • Product

    High temperature CVD equipment All-in-one CVD equipment

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1 Models of High temperature CVD equipment All-in-one CVD equipment

Image Part Number Price (excluding tax) Footprint Reactor Board size Substrate heating Maximum heating temperature Applicable
High temperature CVD equipment All-in-one CVD equipment-Part Number-All-in-one CVD equipment

All-in-one CVD equipment

Available upon quote

1.3×1.3m

Horizontalquartz

Φ2 inch x 1 piece

High frequency heating method

1,500℃ (radiation thermometer value)

Si, sic etc.

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Epiquest Co., Ltd.

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