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  4. High temperature CVD equipment SiC CVD equipment HTC3001 (Epiquest Co., Ltd.)
High temperature CVD equipment SiC CVD equipment HTC3001-HTC3001
High temperature CVD equipment SiC CVD equipment HTC3001-Epiquest Co., Ltd.

High temperature CVD equipment SiC CVD equipment HTC3001
Epiquest Co., Ltd.

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    High temperature CVD equipment SiC CVD equipment HTC3001

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1 Models of High temperature CVD equipment SiC CVD equipment HTC3001

Image Part Number Price (excluding tax) Reactor Board size Substrate heating Loading room Maximum heating temperature Applicable
High temperature CVD equipment SiC CVD equipment HTC3001-Part Number-HTC3001

HTC3001

Available upon quote

Vertical quartz face down

Φ3 inch x 1 piece

High frequency heating method

With transfer rod

1,800℃ (radiation thermometer value)

Sic etc.

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