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  4. Liquid raw material supply MOCVD equipment for research/semi-production MPC6100 (Epiquest Co., Ltd.)
Liquid raw material supply MOCVD equipment for research/semi-production MPC6100-MPC6100
Liquid raw material supply MOCVD equipment for research/semi-production MPC6100-Epiquest Co., Ltd.

Liquid raw material supply MOCVD equipment for research/semi-production MPC6100
Epiquest Co., Ltd.

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    Liquid raw material supply MOCVD equipment for research/semi-production MPC6100

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1 Models of Liquid raw material supply MOCVD equipment for research/semi-production MPC6100

Image Part Number Price (excluding tax) Reactor Board size Substrate heating Loading room Maximum heating temperature Vaporization method Flow control Applicable
Liquid raw material supply MOCVD equipment for research/semi-production MPC6100-Part Number-MPC6100

MPC6100

Available upon quote

Verticalstainless steel

Φ6 inch x 1 piece

Resistance heating method

With transfer rod

800℃ (control thermocouple value)

Thermal vaporizer

Liquid mass flow controller

Oxides including PZT

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