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  4. MOCVD equipment vertical reactor SV3001 (Epiquest Co., Ltd.)
MOCVD equipment vertical reactor SV3001-SV3001
MOCVD equipment vertical reactor SV3001-Epiquest Co., Ltd.

MOCVD equipment vertical reactor SV3001
Epiquest Co., Ltd.

About This Product

The SV series uses a vertical quartz reactor that has been optimally designed based on excellent simulation technology and many years of experience. This is a best-selling machine with a history of over 30 years for GaAs and InP materials. Since it is a single-sheet machine, it has excellent uniformity, reproducibility, and sharpness, characteristics that cannot be achieved with multiple sheets. We have a rich track record of delivering products not only for research purposes but also for production purposes. In addition, the SVS series, equipped with a water-cooled proximity showerhead structure, achieves highly efficient growth by separately supplying highly reactive gas close to the wafer. It is also ideal for growing oxides such as Ga2O3.

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    MOCVD equipment vertical reactor SV3001

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1 Models of MOCVD equipment vertical reactor SV3001

Image Part Number Price (excluding tax) Wafer surface Gas control box Cylinder cabinet Process exhaust Reactor shape Control device interlock function Control device Backup power supply Control device Safety device Control device operation panel Control device error display Control device Automatic growth system Substrate (wafer) size x number of wafers Substrate heating Substrate rotation mechanism Loading room Board storage mechanism (3 sheets in stock) Loading chamber Exhaust system Maximum heating temperature Transport mechanism
MOCVD equipment vertical reactor SV3001-Part Number-SV3001

SV3001

Available upon quote

Face up

6 organometallic systems, 3 hydride systems, 2 carrier gas systems, 2 vent gas systems, dummy line, purge line

47L (10L) 4 containers (3 gas, 1 nitrogen)

Rotary pump (dry pump available as an option)

Vertical quartz or stainless steel

Standard equipment

Standard equipment

Standard equipment

Standard equipment

Standard equipment

Standard equipment

Φ3 inch x 1 piece

Resistance heating method

0~30rpm

Standard equipment

Turbo molecular pump + rotary pump
*Dry pump is available as an option.

900℃ (control thermocouple value)

Transfer rod type or rail type

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