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MBE equipment for research RC2100Handling Company
Epiquest Co., Ltd.Categories
| Image | Part Number | Price (excluding tax) | RHEED system (30KeV) | RHEED screen size | Interlock function | Cryopump | Rail transport mechanism | Preheating mechanism (Max500℃) | Telescoping flux monitor | Molecular beam cell port (size x number) | Substrate (wafer) size x number of wafers | Board storage mechanism (4 sheets in stock) | Board heating temperature Optional specifications (control thermocouple value) | Board heating temperature standard specifications (control thermocouple value) | Growth chamber ultimate pressure (Pa) | Growth chamber ion pump | Growth chamber turbomolecular pump | Charge chamber turbo molecular pump | Charge chamber ultimate pressure (Pa) | Loading chamber Transfer mechanism (unnecessary for rotational expansion/contraction) | Expansion port (size x number) | Transfer chamber transfer rod type ion pump | Transfer chamber transfer rod type ultimate pressure (Pa) | Transfer chamber transfer rod type transfer mechanism | Transfer chamber rotating telescopic arm type ion pump | Transfer chamber rotating telescopic arm type Ultimate pressure (Pa) | Transfer chamber rotating telescopic arm type transfer mechanism | Operation panel (touch panel) | Abnormal display |
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RC2100 |
Available upon quote |
Standard equipment |
ICF152 |
Standard equipment |
Option |
Option |
Standard equipment |
Standard equipment |
ICF114×8 |
Φ2”×1 |
Standard equipment |
1,200℃ |
900℃ |
＜1.33×10^-8 |
500l/sec |
Option |
300l/sec |
＜1.33×10^-5 |
Transfer rod type or rail type |
ICF152×2 |
150l/sec |
＜6.6×10^-7 |
Transfer rod type |
300l/sec |
＜6.6×10^-7 |
Rotating telescopic arm type |
Standard equipment |
Standard equipment |
Reviews shown here are reviews of companies.
Reviews shown here are reviews of companies.
