Low -pressure plasma system batch type system-V10-G
Low -pressure plasma system batch type system-PINK GmbH

Low -pressure plasma system batch type system
PINK GmbH


About This Product

A high -performance batch type system for removing a photo register. The batch-type system V10-G is a system designed to remove photo resistors. It is also suitable for wafer cleaning. ◆ Applicable range It is suitable for removing a photo register (and SU-8) after a dry process such as RIE and ion beam etching and after a high dose implant. ・ Processing silicon wafers and other substrates before wet processes ・ Used for MEMS and nanotechnology processes ・ Removal of surplus polymer after Bosch process ・ Removal of organic sacrifices ・ Conditioning of physiological substances Pink Company is a global manufacturer that develops agency sales networks in each field worldwide and supplies customization equipment and equipment. High -quality and innovative products have the strong trust of the world's famous technical research companies. Pink Company is an optimal partner that can provide high -quality customization vacuum plasma devices that can handle all sizes in various devices. Pink also provides independent devices, tapes, roll machines and inline devices. ◆ What is low pressure plasma? Gentle power in the fourth state The substance changes its condition depending on the temperature. The aggregate of the generally known substances is solid, liquid, and gas. However, there is a state that follows these. That is plasma. The plasma is an ionized state of the gas and is also called the "fourth state". The differences between gas and plasma are high electrical conductivity and chemical reaction. ◆ Energy that does not generate heat At atmospheric pressure, plasma emits high fever. For example, flames and arc discharge. If you lower the air pressure to, for example, 100 PA, you can generate plasma at low temperatures. It is a so -called non -heated plasma. In low -pressure plasma processing, the temperature of the gas is low, so heating to the processed material is very small. However, an electronic energy equivalent to a few million degrees of temperature occurs in that state. In other words, low -pressure plasma has made it possible to process plasma, a material that is sensitive to temperature and temperature.

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    Low -pressure plasma system batch type system




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1 Models of Low -pressure plasma system batch type system

Product Image Part Number Price (excluding tax)
Low -pressure plasma system batch type system-Part Number-V10-G

V10-G

Available upon quote

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