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  4. Mass flow controller Z500 series (Air Water Mechatronics Co., Ltd.)
Mass flow controller Z500 series-Mass Flow Controller 10 SCCM ~ 50 SLM
Mass flow controller Z500 series-Air Water Mechatronics Co., Ltd.

Mass flow controller Z500 series
Air Water Mechatronics Co., Ltd.

About This Product

■Summary

The SEC series is a high-performance mass flow controller made entirely in Japan that was developed by bringing together the best of HORIBA STEC's flow measurement and control technology. Mass flow controllers measure and control fluid mass flow meters. The built-in high-performance flow sensor and high-resolution flow control valve control the flow rate to the flow rate set value given by an external electrical signal, without being affected by changes in the usage environment or supply pressure fluctuations. In response to higher precision and multi-functionality, we also have a lineup of digital mass flow controllers equipped with a CPU.

■Series features

・High accuracy ±1.0S.P (set point) guaranteed ・High-speed support Full range within 1 second (T98) ・Multi-range/multi-gas compatible

  • Product

    Mass flow controller Z500 series

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1 Models of Mass flow controller Z500 series

Image Part Number Price (excluding tax)
Mass flow controller Z500 series-Part Number-Mass Flow Controller 10 SCCM ~ 50 SLM

Mass Flow Controller 10 SCCM ~ 50 SLM

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Air Water Mechatronics Co., Ltd.

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