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  4. Turbomolecular pump UTM-MI (ULVAC, Inc)
Turbomolecular pump UTM-MI-UTM1200A
Turbomolecular pump UTM-MI-ULVAC, Inc

Turbomolecular pump UTM-MI
ULVAC, Inc

About This Product

A turbo molecular pump with integrated controller that uses magnetic bearings. By integrating the pump body and controller, wiring and space savings have been realized.

■Features

- Pump body and controller are integrated. No need for troublesome wiring work between the pump body and controller. ・Free installation direction. Since there are no restrictions on the mounting direction, the degree of freedom in device design increases. - Lineup includes pumping speeds of 1,000L/s to 3,000L/s. ・Wide area high flow rate design for light processes - Pump rotation speed is variable in the range of 25 to 100%. The rotation speed can be varied and the chamber pressure can be adjusted. ・High durability and safety. It has passed various safety confirmation tests, including atmospheric entry tests and touchdown tests. Purpose

■Vacuum main exhaust system for various equipment

・Semiconductor manufacturing equipment ・Vapor deposition equipment ・Sputtering equipment ・Analysis equipment, experimental equipment, etc. ・Research and development equipment ・Main exhaust system for light processes that does not generate side reaction products ・Replacement from equipment equipped with oil diffusion pump ・Other general high vacuum exhaust applications

  • Product

    Turbomolecular pump UTM-MI

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1 Models of Turbomolecular pump UTM-MI

Image Part Number Price (excluding tax)
Turbomolecular pump UTM-MI-Part Number-UTM1200A

UTM1200A

Available upon quote

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About Company Handling This Product

ULVAC, Inc

Company Overview

Ulvac Inc., established in 1952 and headquartered in Kanagawa, Japan, is a manufacturer of vacuum equipment, c...

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  • Japan

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Vacuum Pumps
Vacuum Pumps　ULVAC, Inc
ULVAC, Inc

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