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  4. Turbomolecular pump UTM-MS (ULVAC, Inc)
Turbomolecular pump UTM-MS-UTM300A-MS
Turbomolecular pump UTM-MS-ULVAC, Inc

Turbomolecular pump UTM-MS
ULVAC, Inc

About This Product

This is a turbo molecular pump with a separate controller that uses magnetic bearings. We have a lineup of models with pumping speeds of 300 to 4,000L/s. The controller section can monitor the operating status and is compatible with various communication standards.

■Features

・The pump body and controller are separate. The controller section can monitor the operating status and is compatible with various communication standards. ・Free installation direction. Since there are no restrictions on the mounting direction, the degree of freedom in device design increases. ・Lineup of pumping speeds from 300L/s to 4,000L/s - Pump rotation speed is variable in the range of 25 to 100%. The rotation speed can be varied and the chamber pressure can be adjusted. ・High durability and safety. It has passed various safety confirmation tests, including atmospheric entry tests and touchdown tests.

■Applications

・Vacuum main exhaust system for various equipment - Semiconductor manufacturing equipment - Vapor deposition equipment - Sputtering equipment - Analytical equipment, experimental equipment, etc. - Research and development equipment ・Main exhaust system for light processes that does not generate side reaction products ・Other general high vacuum exhaust applications

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    Turbomolecular pump UTM-MS

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1 Models of Turbomolecular pump UTM-MS

Image Part Number Price (excluding tax)
Turbomolecular pump UTM-MS-Part Number-UTM300A-MS

UTM300A-MS

Available upon quote

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About Company Handling This Product

ULVAC, Inc

Company Overview

Ulvac Inc., established in 1952 and headquartered in Kanagawa, Japan, is a manufacturer of vacuum equipment, c...

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  • Japan

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Vacuum Pumps
Vacuum Pumps　ULVAC, Inc
ULVAC, Inc

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