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X-ray film thickness measuring device Film density composition measuring device K-MSX-K-MSX
X-ray film thickness measuring device Film density composition measuring device K-MSX-Ryokosha Co., Ltd.

X-ray film thickness measuring device Film density composition measuring device K-MSX
Ryokosha Co., Ltd.

Ryokosha Co., Ltd.'s Response Status

Response Rate

100.0%

Response Time

27.5hours

Relatively Fast Response


About This Product

■Summary

This device is capable of non-destructive absolute film thickness/density measurement and composition evaluation of semiconductor process wafers up to 300mm and samples up to 200mm□.

■Features

-Can be equipped with an X-ray reflectance unit, fluorescent X-ray unit, and oblique incidence fluorescent X-ray unit. - Units can be selected for measurements tailored to various applications. Introduction to X-ray unit

■X-ray reflectance (XRR)

Measures the absolute value of thin films, film thickness, and density such as metal films and transparent films.

■X-ray fluorescence (XRF)

・Measures the thickness of metal films in a short time. ・Measure the composition ratio of compounds. ・Simultaneous measurement of film thickness and composition is possible.

■Incidence X-ray fluorescence (GI-XRF)

・Measures ultra-thin metal films with high accuracy. ・Evaluation is possible without the influence of the base film. ・Simultaneous measurement of film thickness and composition is possible. application

■Organic film (single layer film thickness measurement)

Unlike optical interference type film thickness meters, the X-ray reflectance method is not affected by optical coefficients, so it is possible to measure with high precision the in-plane uniformity of samples that are susceptible to optical coefficients.

■Laminated structure (laminated film thickness measurement)

The thickness and density of laminated films can be measured simultaneously from the amplitude waveform obtained using the X-ray reflectance method.

  • Product

    X-ray film thickness measuring device Film density composition measuring device K-MSX

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1 Models of X-ray film thickness measuring device Film density composition measuring device K-MSX

Image Part Number Price (excluding tax)
X-ray film thickness measuring device Film density composition measuring device K-MSX-Part Number-K-MSX

K-MSX

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About Company Handling This Product

Response Rate

100.0%


Response Time

27.5hrs

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