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  4. Air slide stage RC ceramic air slide for high precision positioning of measuring instruments (PMT Co., Ltd.)
Air slide stage RC ceramic air slide for high precision positioning of measuring instruments-2RC025
Air slide stage RC ceramic air slide for high precision positioning of measuring instruments-PMT Co., Ltd.

Air slide stage RC ceramic air slide for high precision positioning of measuring instruments
PMT Co., Ltd.

About This Product

The Ceramic Air Slide RC series is a completely non-contact guide using aerostatic pressure. Unlike LM Guides and Cross Guides, there is no vibration caused by rolling, so sliding resistance is extremely low and high-speed movement is possible. In addition, its posture accuracy (pitching and yaw) values ​​are small and high straightness can be maintained, making it ideal for equipment stages that require highly accurate traveling motion, such as measuring instruments and semiconductor manufacturing equipment. By using alumina ceramics with excellent rigidity, there is almost no deterioration over time, and there is no need for lubrication with oil or grease, so it can be used semi-permanently without maintenance.

■Characteristics of RC Ceramic Air Slide Measurement method and definition of each value

・Rigidity: Expressed by converting the amount of load when a constant load is applied to the center of the table and the table is displaced by 1 µm. (Excluding guide shaft rigidity) ・Load capacity: Expresses the amount of load when a load is applied to the center of the table and the table and guide shaft come into contact. ・Load capacity: Expresses the amount of load when a load is applied to the center of the table and the table and guide shaft come into contact.

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    Air slide stage RC ceramic air slide for high precision positioning of measuring instruments

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1 Models of Air slide stage RC ceramic air slide for high precision positioning of measuring instruments

Image Part Number Price (excluding tax) Air consumption flow rate (NL/min) Straightness* (µm/Stroke) Maximum load (kgf) Stiffness (kgf/µm) Yawing (µm) Pitching (µm) Stroke (mm)
Air slide stage RC ceramic air slide for high precision positioning of measuring instruments-Part Number-2RC025

2RC025

Available upon quote

8 or less

Up/down: 0.1, left/right: 0.1

2

Up/down: 1.0, left/right: 0.8

0.01

0.01

Twenty five

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About Company Handling This Product

PMT Co., Ltd.

  • Japan

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