Ultra fine leak test system MUH-0100 series
FUKUDA CO., LTD.
About This Product
■Measuring ultra-micro leaks
MEMS components and small electronic components, such as angular velocity sensors and infrared image sensors, must maintain their internal sealing properties for many years, and are required to have a high level of airtightness. Fukuda has developed a highly sensitive helium leak detection technology called ``capsule accumulation method'' to measure ultra-micro leaks. The MUH-0100 series is an airtightness inspection device that uses the "capsule accumulation method" and is dedicated to measuring ultra-micro leaks.
Patent number PAT.NO.5970618. Vacuum chamber method, capsule accumulation method. This system is a device that performs airtightness inspections using fine leak tests (vacuum chamber method) and ultra fine leak tests (capsule accumulation method). By adopting the capsule accumulation method, it is possible to measure up to a minimum of 4×10⁻¹⁵Pa･m3/s (He).
■Measurement range
In the conventional method, the helium leakage amount was in the 10-10Pa・m3/s (He) range, considering the background effect, but with this technology, the helium leakage amount was in the 10-15Pa・m3/s (He) range. It is possible to measure the amount of leakage. *The amount of leakage that can be measured varies depending on the type and conditions of the product being measured.
■What is “capsule accumulation method”?
The capsule accumulation method is a method of measuring helium leaks by installing a small-volume "capsule" inside a large-volume "chamber" in order to detect minute helium leaks from a workpiece (test item). Measure the micro leakage by following steps ① to ③ below.
① The ``capsule'' and ``chamber'' containing the workpiece (test item) are evacuated, the ``capsule'' is closed, and helium is accumulated to a level that can be detected by a mass spectrometer.
② Open the "capsule" and release the gas inside the "capsule" into the "chamber". ③The diffused helium becomes a molecular stream that passes through the ``aperture'' and is measured by a mass spectrometer.
■Characteristics of “capsule accumulation method”
- Significantly reduces background and allows detection of ultra-small helium leaks. Helium leak detection ability 4×10-15Pa・m3/s (He) ~ *When accumulation time is 2 hours. It depends on test conditions such as pumping conditions, capsule size, and standing time.
- Reduces the influence of gases other than helium that can cause errors. No heater or cryogenic pump is required, and startup time and maintenance are the same as regular helium leak detectors.
・A commercially available standard leak can be used to calibrate the helium accumulation amount.
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Product
Ultra fine leak test system MUH-0100 series
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Handling Company
FUKUDA CO., LTD.
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Categories
1 Models of Ultra fine leak test system MUH-0100 series
| Product Image | Part Number | Price (excluding tax) | Calibrator | Capsule size | Chamber cleaning gas | Display unit | Exhaust | External dimensions | Language | Mass | Maximum work size | Measurement method | Minimum detectable leak amount | Number of channels | Operating temperature/humidity range | Pneumatic source | Power consumption | Power supply voltage | Setting method of inspected object | Simulation | Startup time |
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MUH-0100-1 |
Available upon quote | Fine Helium Leak Standard 10-10Pa・m3/s Calibration Leak (Calibrator is an accessory.) | Type1010 16×10mm square 10 | Supply dry nitrogen or argon gas at a pressure of 0.1 MPa or more and 0.5 MPa or less. | Pa-m3/s (He) | Exhaust the exhaust port to the outside. If the helium concentration in the measurement environment is high, the background will increase. | W760×D770×H1,200mm | Japanese | 200kg | Sealed products within φ44×31mm (square 30) | Helium leak test using mass spectrometer, ultra fine leak: Capsule accumulation method | 4×10^-15Pa-m3/s (He) | 1ch | 23±5℃ (recommended) 50±10%RH (no condensation) | Please supply clean and stable dry air at a pressure of 0.35 MPa or more and 0.6 MPa or less. Based on recommended conditions JISB8392-1:2012. Compressed air cleanliness class 1,3,1 | 800VA | AC100V±10% single phase 50Hz/60Hz | Manual | Use the included computer monitor | 3 minutes |
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About Company Handling This Product
- Japan