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Ultra fine leak test system MUH-0100 series-MUH-0100-1
Ultra fine leak test system MUH-0100 series-FUKUDA CO., LTD.

Ultra fine leak test system MUH-0100 series
FUKUDA CO., LTD.

FUKUDA CO., LTD.'s Response Status

Response Rate

100.0%

Response Time

18.4hours

Relatively Fast Response


About This Product

■Measuring ultra-micro leaks

MEMS components and small electronic components, such as angular velocity sensors and infrared image sensors, must maintain their internal sealing properties for many years, and are required to have a high level of airtightness. Fukuda has developed a highly sensitive helium leak detection technology called ``capsule accumulation method'' to measure ultra-micro leaks. The MUH-0100 series is an airtightness inspection device that uses the "capsule accumulation method" and is dedicated to measuring ultra-micro leaks. Patent number PAT.NO.5970618. Vacuum chamber method, capsule accumulation method. This system is a device that performs airtightness inspections using fine leak tests (vacuum chamber method) and ultra fine leak tests (capsule accumulation method). By adopting the capsule accumulation method, it is possible to measure up to a minimum of 4×10⁻¹⁵Pa・m3/s (He).

■Measurement range

In the conventional method, the helium leakage amount was in the 10-10Pa・m3/s (He) range, considering the background effect, but with this technology, the helium leakage amount was in the 10-15Pa・m3/s (He) range. It is possible to measure the amount of leakage. *The amount of leakage that can be measured varies depending on the type and conditions of the product being measured.

■What is “capsule accumulation method”?

The capsule accumulation method is a method of measuring helium leaks by installing a small-volume "capsule" inside a large-volume "chamber" in order to detect minute helium leaks from a workpiece (test item). Measure the micro leakage by following steps ① to ③ below. ① The ``capsule'' and ``chamber'' containing the workpiece (test item) are evacuated, the ``capsule'' is closed, and helium is accumulated to a level that can be detected by a mass spectrometer. ② Open the "capsule" and release the gas inside the "capsule" into the "chamber". ③The diffused helium becomes a molecular stream that passes through the ``aperture'' and is measured by a mass spectrometer.

■Characteristics of “capsule accumulation method”

- Significantly reduces background and allows detection of ultra-small helium leaks. Helium leak detection ability 4×10-15Pa・m3/s (He) ~ *When accumulation time is 2 hours. It depends on test conditions such as pumping conditions, capsule size, and standing time. - Reduces the influence of gases other than helium that can cause errors. No heater or cryogenic pump is required, and startup time and maintenance are the same as regular helium leak detectors. ・A commercially available standard leak can be used to calibrate the helium accumulation amount.

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    Ultra fine leak test system MUH-0100 series

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1 Models of Ultra fine leak test system MUH-0100 series

Image Part Number Price (excluding tax) Power supply voltage Startup time Mass Language Setting method of inspected object Display unit Pneumatic source Measurement method Power consumption Calibrator Minimum detectable leak amount Maximum work size Exhaust External dimensions Operating temperature/humidity range Chamber cleaning gas Number of channels Simulation Capsule size
Ultra fine leak test system MUH-0100 series-Part Number-MUH-0100-1

MUH-0100-1

Available upon quote

AC100V±10% single phase 50Hz/60Hz

3 minutes

200kg

Japanese

Manual

Pa-m3/s (He)

Please supply clean and stable dry air at a pressure of 0.35 MPa or more and 0.6 MPa or less. Based on recommended conditions JISB8392-1:2012. Compressed air cleanliness class 1,3,1

Helium leak test using mass spectrometer, ultra fine leak: Capsule accumulation method

800VA

Fine Helium Leak Standard 10-10Pa・m3/s Calibration Leak (Calibrator is an accessory.)

4×10^-15Pa-m3/s (He)

Sealed products within φ44×31mm (square 30)

Exhaust the exhaust port to the outside. If the helium concentration in the measurement environment is high, the background will increase.

W760×D770×H1,200mm

23±5℃ (recommended) 50±10%RH (no condensation)

Supply dry nitrogen or argon gas at a pressure of 0.1 MPa or more and 0.5 MPa or less.

1ch

Use the included computer monitor

Type1010 16×10mm square 10

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About Company Handling This Product

Response Rate

100.0%


Response Time

18.4hrs


Company Review

5.0

Company Overview

Fukuda Co., Ltd. is a manufacturer of inspection equipment for industries such as automobiles, aircraft, elect...

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