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  4. UV exposure equipment UVL-3 (Tsubosaka Electric Co., Ltd.)
UV exposure equipment UVL-3-UVL-3
UV exposure equipment UVL-3-Tsubosaka Electric Co., Ltd.

UV exposure equipment UVL-3
Tsubosaka Electric Co., Ltd.

About This Product

■Features

・Simple exposure and printing equipment for photolithography process ・Tabletop type/integrated type saves space ・Equipped with color LCD and cross key ・Accurately control irradiation time

■Operating procedure

① Turn on the power and turn on the lamp ② After the lamp stabilizes, adjust and register the irradiance ③Set the exposure time (display the exposure amount as irradiance x time) ④ Exposure For time exposure, open and close the shutter automatically; for manual exposure, open and close the shutter manually while checking the exposure amount Extensions

■[Option]

・Change irradiance (change to 20 or less) ・Supports exposure mask (addition of mask holder and sample tray)

■[Custom]

・Change of sample dimensions (customization is possible as the irradiation range is also changed)

  • Product

    UV exposure equipment UVL-3

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1 Models of UV exposure equipment UVL-3

Image Part Number Price (excluding tax) Exposure time Power supply voltage Weight (kg) Communication I/F Sample stand Sample size (mm x mm) Display/operation Illuminance surface (WxH) (mm) Illuminance unevenness (± %) Power consumption (VA) Irradiance (mW/cm2) Dimensions (WxHxD) (mm) Operating environment Light source
UV exposure equipment UVL-3-Part Number-UVL-3

UVL-3

Available upon quote

0.1 - 99.9 (up to 99 hours)

AC100V 50/60Hz

30

Connector: USB 2.0 Type-B Communication: UART with virtual COM port

Fixed type/with plane fine adjustment mechanism

100x100

Main unit operation External communication control

Irradiation range: φ155 Effective: φ113 mm

5 within the effective area

450

Regular use: 20 - 22 Maximum: 24

422.5mm (W) ×781mm (H) ×357mm (D) Excluding protrusions

Temperature: 5 - 35[℃] Humidity: 80[%] or less, but no condensation

Ultra high pressure mercury lamp 250W

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About Company Handling This Product

Tsubosaka Electric Co., Ltd.

  • Japan

Related search keywords

Semiconductor Lithography Equipment
Semiconductor Lithography Equipment　Tsubosaka Electric Co., Ltd.
Tsubosaka Electric Co., Ltd.

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