This product is registered by Denshi Giken Co., Ltd..
About This Product
■Summary
The substrate is subjected to phenomenon/etching/drying treatment using a spray method.
■Features
・Highly accurate and uniform process using spin and spray
・Transportation by double-handed robot
・Parallel processing of development/etching/drying, etc.
・With cup cleaning function
・Drying in a short time using N2 blow and high speed spin rotation
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