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  4. Electron beam vacuum evaporation equipment 3KV ion gun power supply (Atotech Co., Ltd.)

Electron beam vacuum evaporation equipment 3KV ion gun power supply
Atotech Co., Ltd.

About This Product

SPUTTER ION SOURCE The control power supply for the 3KV ion gun (SIG030) has an auto-emission mechanism and is a stable ion source.

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    Electron beam vacuum evaporation equipment 3KV ion gun power supply

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1 Models of Electron beam vacuum evaporation equipment 3KV ion gun power supply

Image Part Number Price (excluding tax) Power case Acceleration power supply Input power Lens power supply Filament power supply Interlock mechanism Ionization power supply

IGP030

Available upon quote

JIS150×480×430

+3KV 2mA

AC100V

-3KV 0.5mA

AC20V 5A (auto emission)

Standard equipment

+150V 0.3A

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About Company Handling This Product

Atotech Co., Ltd.

  • Japan

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