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  4. Drum sputtering equipment for particle surface film formation (Arios Co., Ltd.)
Drum sputtering equipment for particle surface film formation-Drum sputtering equipment for particle surface film formation
Drum sputtering equipment for particle surface film formation-Arios Co., Ltd.

Drum sputtering equipment for particle surface film formation
Arios Co., Ltd.

Arios Co., Ltd.'s Response Status

Response Rate

100.0%

Response Time

1.7hours

Very Fast Response

About This Product

■Summary

In order to uniformly form a film on the surface of the sample, this device places the sample in a drum-shaped sample holder and performs film formation while rotating. By stirring the sample through the rotating motion of the sample holder, agglomeration is prevented and uniform and efficient sputtering film formation is possible.

■Features

・Equipped with a dedicated rectangular cathode unit with a target size of 150mm x 50mm as standard. ・We have taken various safety measures such as interlocks for high voltage power supply and motor drive. ・DC 1,200W (standard), RF specifications are also available. -Discharge status can be checked from the front hatch. ・The rotation speed of the sample holder can be set in the range of 0-20 rpm. -The sample holder can be attached and removed with the sample in it, making it easy to collect the sample after film formation.

■Options

・Sample stirring blade (detachable structure) ・Shutter unit (between target and sample holder) ・RF compatible

■Custom specifications

・Cathode diversification ・Automatic sample input and collection mechanism

  • Product

    Drum sputtering equipment for particle surface film formation

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1 Models of Drum sputtering equipment for particle surface film formation

Image Part Number Price (excluding tax) Sample holder rotation mechanism Sample holder processing capacity Sample holder Holder material Sample holder size/shape Exhaust system (example) Deposition chamber Ultimate pressure Main onboard equipment Cathode unit cooling method Cathode unit target dimensions Cathode unit DC power output
Drum sputtering equipment for particle surface film formation-Part Number-Drum sputtering equipment for particle surface film formation

Drum sputtering equipment for particle surface film formation

Available upon quote

Motor drive (0-20rpm variable)

0.5/1 batch (sample diameter: φ0.5mm)

SUS304

Drum shape (cylindrical)
φ250mm×L180mm (inner size)

Turbomolecular pump (355L/s)
Rotary pump (203L/min)
Crystal ion gauge, diaphragm vacuum gauge

Φ360mm×L350mm (inner size) / SUS304
JIS350 hatch mechanism

5×10^-4Pa or less (when the chamber is empty)

Rectangular magnetron cathode unit
sample holder

Water cooling (flow meter with contacts)

50mm×150mm×t5mm (magnetic material is t1mm)

MAX 1kV・1.2A (1,200W) variable

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About Company Handling This Product

Arios Co., Ltd.

Response Rate

100.0%

Response Time

1.7hrs

  • Japan

Related search keywords

Vacuum Vapor Deposition Devices
Vacuum Vapor Deposition Devices　Arios Co., Ltd.
Arios Co., Ltd.

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