Drum sputtering equipment for particle surface film formation
Arios Co., Ltd.
About This Product
■Summary
In order to uniformly form a film on the surface of the sample, this device places the sample in a drum-shaped sample holder and performs film formation while rotating. By stirring the sample through the rotating motion of the sample holder, agglomeration is prevented and uniform and efficient sputtering film formation is possible.
■Features
・Equipped with a dedicated rectangular cathode unit with a target size of 150mm x 50mm as standard.
・We have taken various safety measures such as interlocks for high voltage power supply and motor drive.
・DC 1,200W (standard), RF specifications are also available.
-Discharge status can be checked from the front hatch.
・The rotation speed of the sample holder can be set in the range of 0-20 rpm.
-The sample holder can be attached and removed with the sample in it, making it easy to collect the sample after film formation.
■Options
・Sample stirring blade (detachable structure)
・Shutter unit (between target and sample holder)
・RF compatible
■Custom specifications
・Cathode diversification
・Automatic sample input and collection mechanism
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Product
Drum sputtering equipment for particle surface film formation
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Handling Company
Arios Co., Ltd.
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Categories
1 Models of Drum sputtering equipment for particle surface film formation
| Product Image | Part Number | Price (excluding tax) | Cathode unit DC power output | Cathode unit cooling method | Cathode unit target dimensions | Deposition chamber | Exhaust system (example) | Main onboard equipment | Sample holder Holder material | Sample holder processing capacity | Sample holder rotation mechanism | Sample holder size/shape | Ultimate pressure |
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Drum sputtering equipment for particle surface film formation |
Available upon quote | MAX 1kV・1.2A (1,200W) variable | Water cooling (flow meter with contacts) | 50mm×150mm×t5mm (magnetic material is t1mm) |
Φ360mm×L350mm (inner size) / SUS304 JIS350 hatch mechanism |
Turbomolecular pump (355L/s) Rotary pump (203L/min) Crystal ion gauge, diaphragm vacuum gauge |
Rectangular magnetron cathode unit sample holder |
SUS304 | 0.5/1 batch (sample diameter: φ0.5mm) | Motor drive (0-20rpm variable) |
Drum shape (cylindrical) φ250mm×L180mm (inner size) |
5×10^-4Pa or less (when the chamber is empty) |
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About Company Handling This Product
- Japan