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  3. Gas Analyzers
  4. Temperature programmed desorption gas analyzer (Arios Co., Ltd.)
Temperature programmed desorption gas analyzer-Infrared heating method (1,000℃ type)
Temperature programmed desorption gas analyzer-Arios Co., Ltd.

Temperature programmed desorption gas analyzer
Arios Co., Ltd.

Arios Co., Ltd.'s Response Status

Response Rate

100.0%

Response Time

1.7hours

Very Fast Response

About This Product

Overview This device is an analytical device that can raise the temperature of a sample in an ultra-high vacuum and use a mass spectrometer to observe the desorbed molecules in real time. By obtaining a temperature-programmed desorption spectrum, it is possible to obtain a lot of information such as the identification of adsorbed chemical species on the solid surface, the adsorption amount and state, and the desorption process from the surface.

■Features

・Because the structure heats only the sample under ultra-high vacuum, the background is low and high-sensitivity analysis is possible for components such as water, hydrogen, oxygen, and nitrogen. - Ideal for evaluating wafer surface contamination, investigating residual film formation gas, investigating the cause of abnormalities such as film peeling, and investigating outgassing from various materials. -Equipped with a load-lock chamber, allowing samples to be exchanged while maintaining an ultra-high vacuum in the analysis chamber. ・We will propose the optimal equipment configuration with a design tailored to your desired quadrupole mass spectrometer (QMS). ・With a functional layout unique to our company, which is well-versed in ultra-high vacuum technology, we have achieved simple functions and operability, making it easy to handle and at a reasonable price.

■Options

・Change to high frequency electromagnetic induction heating method ・Movable thermocouple (thermocouple + linear introducer/stroke 60mm)

  • Product

    Temperature programmed desorption gas analyzer

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1 Models of Temperature programmed desorption gas analyzer

Image Part Number Price (excluding tax) Measurement mass number range Temperature sensor Minimum detection partial pressure Heating temperature range Board transportation Substrate stage material Heating method Ultimate pressure Sample dimensions
Temperature programmed desorption gas analyzer-Part Number-Infrared heating method (1,000℃ type)

Infrared heating method (1,000℃ type)

Available upon quote

1 ~ 200amu *Depends on QMS specifications

C type thermocouple (for heater control)
K type thermocouple (for sample temperature measurement/60mm movable contact type)
*Movable thermocouple is optional.

＜1×10^-12Pa *Depends on QMS specifications

Room temperature (RT) ~ 1,000℃ (Max)

Transfer rod (manual)
*Samples are transported in a quartz holder.

Quartz

Infrared heating method
Halogen lamp 500W (water-cooled) + gold mirror

1×10^-7Pa or less (analysis room)

10mm×10mm 3mmt

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About Company Handling This Product

Arios Co., Ltd.

Response Rate

100.0%

Response Time

1.7hrs

  • Japan

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