Temperature programmed desorption gas analyzer
Arios Co., Ltd.
About This Product
Overview
This device is an analytical device that can raise the temperature of a sample in an ultra-high vacuum and use a mass spectrometer to observe the desorbed molecules in real time. By obtaining a temperature-programmed desorption spectrum, it is possible to obtain a lot of information such as the identification of adsorbed chemical species on the solid surface, the adsorption amount and state, and the desorption process from the surface.
■Features
・Because the structure heats only the sample under ultra-high vacuum, the background is low and high-sensitivity analysis is possible for components such as water, hydrogen, oxygen, and nitrogen.
- Ideal for evaluating wafer surface contamination, investigating residual film formation gas, investigating the cause of abnormalities such as film peeling, and investigating outgassing from various materials.
-Equipped with a load-lock chamber, allowing samples to be exchanged while maintaining an ultra-high vacuum in the analysis chamber.
・We will propose the optimal equipment configuration with a design tailored to your desired quadrupole mass spectrometer (QMS).
・With a functional layout unique to our company, which is well-versed in ultra-high vacuum technology, we have achieved simple functions and operability, making it easy to handle and at a reasonable price.
■Options
・Change to high frequency electromagnetic induction heating method
・Movable thermocouple (thermocouple + linear introducer/stroke 60mm)
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Product
Temperature programmed desorption gas analyzer
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Handling Company
Arios Co., Ltd.
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Categories
1 Models of Temperature programmed desorption gas analyzer
| Product Image | Part Number | Price (excluding tax) | Board transportation | Heating method | Heating temperature range | Measurement mass number range | Minimum detection partial pressure | Sample dimensions | Substrate stage material | Temperature sensor | Ultimate pressure |
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Infrared heating method (1,000℃ type) |
Available upon quote |
Transfer rod (manual) *Samples are transported in a quartz holder. |
Infrared heating method Halogen lamp 500W (water-cooled) + gold mirror |
Room temperature (RT) ~ 1,000℃ (Max) | 1 ~ 200amu *Depends on QMS specifications | ＜1×10^-12Pa *Depends on QMS specifications | 10mm×10mm 3mmt | Quartz |
C type thermocouple (for heater control) K type thermocouple (for sample temperature measurement/60mm movable contact type) *Movable thermocouple is optional. |
1×10^-7Pa or less (analysis room) |
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About Company Handling This Product
- Japan