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MBE equipment-MBE equipment
MBE equipment-Arios Co., Ltd.

Arios Co., Ltd.'s Response Status

Response Rate

100.0%

Response Time

1.7hours

Very Fast Response


About This Product

■Summary

Arios is a professional group with over 20 years of experience in manufacturing MBE equipment. Arios' MBE equipment supports substrate sizes 1" to 6" and III-VI groups. We perform detailed design and manufacturing according to customer specifications. In addition, we manufacture everything in-house, from main parts such as molecular beam cells, RHEED, BFM, and substrate heating mechanisms to control units. This allows us to manufacture custom-made products with short lead times and high quality. Please feel free to contact us if you have any questions about the MBE equipment, such as maintenance, modification, etc.

■Features

- Capable of film formation in a clean vacuum - In addition to Arios' ultra-high vacuum technology, we thoroughly heat and degas the main parts such as the molecular beam cell and substrate heating mechanism. ・A wide variety of options to choose from - RHEED, BFM, radical sources, etc. ・Automatic operation of exhaust operation and process operation - Automatic operation is possible using the touch panel and sequencer. ・Convenience of transportation system - Compatible with trolley transportation and transfer transportation. Automatic transport is also possible.

■Attachable components

RHEED, molecular beam cells, microwave ion sources, etc. are all manufactured by Arios, so we can respond flexibly.

  • Product

    MBE equipment

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1 Models of MBE equipment

Image Part Number Price (excluding tax) Utility liquid nitrogen Utilities Compressed air (for valve operation) Utility single phase Utility Dry nitrogen (for atmospheric release) Material Vacuum heater lead wire Material Liquid nitrogen shroud Material Heating part Material Bellows part Material Chamber body Exhaust system Substrate rotation heating mechanism Ultimate pressure Molecular beam cell
MBE equipment-Part Number-MBE equipment

MBE equipment

Available upon quote

0.05MPa

0.5~0.7MPa

AC100V, three phase: AC200V

0.1~0.5MPa

Ag (Au, Ni, Al)

SUS 316L

Mo and Ta, Al2 O3, carbon

SUS 304

SUS 304 (or 304L or 316)

Various pumps can be selected and combined, including ion pumps, turbomolecular pumps, TSP, cryopumps, etc.

Maximum 800℃ (high temperature specification 1,000℃), available for 1" to 6

1×10^-8Pa or less (when liquid nitrogen is introduced in the film forming chamber)

Standard 4~8 installation (φ114CF), 5cc~100cc, various types available from high temperature to low temperature.

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About Company Handling This Product

Response Rate

100.0%


Response Time

1.7hrs

  • Japan

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