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3D measuring instrument High precision 3D shape measurement system E-Measure3d series (commercially available sensor type)-EMS-3D 100XY
3D measuring instrument High precision 3D shape measurement system E-Measure3d series (commercially available sensor type)-COMS Co., Ltd.

3D measuring instrument High precision 3D shape measurement system E-Measure3d series (commercially available sensor type)
COMS Co., Ltd.

COMS Co., Ltd.'s Response Status

Response Rate

100.0%

Response Time

21.0hours

Relatively Fast Response


About This Product

■3D measuring device that can be used regardless of manufacturer by using your own commercially available sensors.

It is possible to measure the shape of any object to be measured at high speed and with high precision at low cost. This is a system that uses your commercially available laser displacement sensor to construct a low-cost three-dimensional shape measurement system that measures minute surface shapes non-contact and with high precision. Any laser displacement sensor with analog output can be used regardless of manufacturer. Combining COMS' unique motion control technology and application technology, it is possible to perform all types of surface analysis, including the cross-sectional shape, surface roughness, surface area, and volume of the surface of the object to be measured, with high precision. Three-dimensional display using realistic 3D graphics using 3D analysis software is also possible. It can perform 3D measurements such as non-contact shape measurement, surface roughness measurement, and 3D measurement, allowing accurate non-contact shape measurement of objects that cannot be measured with contact surface roughness meters or general 3D measuring instruments. is possible.

■Non-contact high-precision shape measurement system that can be used with commercially available laser displacement sensors

・Achieve low cost by using commercially available laser displacement sensors ・Measurement principle

■Able to analyze all surface shapes such as cross-sectional shape, surface roughness, surface area, volume, etc.

- Simple operation that anyone can use. ・Measurement data can be expanded as is in Excel

■XY measurement range is standard type and supports □300mm wide area.

・□3 types available from 100mm to 300mm ・Stage can be customized according to your request

■Three types of measurement methods allow you to perform measurements that match your application.

・Equal pitch measurement (stop) ・Equal pitch measurement (continuous) ・Multiple area measurement

■Application

Realistic 3D graphic analysis is possible using 3D analysis software.

■Typical usage examples

・LCD industry ・Semiconductor industry ・Mobile terminal industry ・Printer industry ・Automotive industry ・Other industries

  • Product

    3D measuring instrument High precision 3D shape measurement system E-Measure3d series (commercially available sensor type)

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1 Models of 3D measuring instrument High precision 3D shape measurement system E-Measure3d series (commercially available sensor type)

Image Part Number Price (excluding tax) Measurement software section Measurement settings Measurement software section equipment settings Measurement software section Compatible equipment Measurement software section basic functions Measurement software part model Measurement software section Save file format Measurement software section data conversion Analysis software section display Analysis software department Compatible equipment Analysis software department basic profile Analysis software part model Automatic stage system part weight Automatic stage system section feeding method Automatic stage system section sample stage size Automatic stage system section load capacity Automated stage system section Repeatable positioning accuracy Automatic stage system movement amount Automatic stage system section movement direction Automatic stage system straightness (horizontal/vertical) Automatic stage system unit minimum movement resolution Automated stage system section external dimensions Automatic stage system positioning accuracy Automatic stage system department Lost motion Automatic stage system department backlash Automatic stage system section sensor head position adjustment Automatic stage system section guide method Laser displacement sensor part measurement area Laser displacement sensor measurement accuracy Controller section Displacement sensor data collection Controller part positioning control
3D measuring instrument High precision 3D shape measurement system E-Measure3d series (commercially available sensor type)-Part Number-EMS-3D 100XY

EMS-3D 100XY

Available upon quote

Equal pitch (stop) measurement/equal pitch (continuous) measurement/multiple area measurement

Drive detailed settings (drive speed, communication, display), AD conversion detailed settings (1 channel of collected data, voltage range, voltage value conversion, sign, decimal point)

Our automatic stage system controller, displacement sensor with analog voltage output, PC (compatible OS Windows 10 Japanese version)

Automatic control of XY-axis automatic stage positioning and displacement sensor shape data collection

E-Measure3D

TDV, emd

Display emd file on Excel using Excel converter

3D/2D graph display and numerical analysis of shapes

PC (Supported OS Windows 10 Japanese version)

Height, width, area, diagonal, surface area, roughness Ra, roughness Rzjis, cutoff value setting, roughness curve display, waviness curve display, cursor tracking setting, tilt correction

3D measurement

Approximately 15kg

Precision ball screw lead 2mm

120×120mm

14kg

±1μm

100×100mm

XY axis

2μm (at 30mm stroke), 10μm (at full stroke)

0.1μm (when the number of divisions is set to 40)

370×390×347(H)mm

4μm (at 10mm stroke), 18μm (at full stroke)

3μm

2μm

Rack and pinion type Z-axis manual stage

High rigidity linear ball guide

Measurement reference distance 10mm, measurement range ±1mm
*This is an example of the accuracy of a single laser displacement sensor that can be installed in this system. Actual accuracy varies depending on sensor type, settings, measurement target, usage environment, etc.

Measurement resolution 0.01μm, repeatability 0.01μm
*This is an example of the accuracy of a single laser displacement sensor that can be installed in this system. Actual accuracy varies depending on sensor type, settings, measurement target, usage environment, etc.

AIO-163202FX-USB

3-axis controller with built-in driver CP-700M

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About Company Handling This Product

Response Rate

100.0%


Response Time

21.0hrs

  • Japan

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