3D measuring instrument High precision 3D shape measurement system E-Measure3d series (commercially available sensor type)
COMS Co., Ltd.
About This Product
■3D measuring device that can be used regardless of manufacturer by using your own commercially available sensors.
It is possible to measure the shape of any object to be measured at high speed and with high precision at low cost. This is a system that uses your commercially available laser displacement sensor to construct a low-cost three-dimensional shape measurement system that measures minute surface shapes non-contact and with high precision. Any laser displacement sensor with analog output can be used regardless of manufacturer.
Combining COMS' unique motion control technology and application technology, it is possible to perform all types of surface analysis, including the cross-sectional shape, surface roughness, surface area, and volume of the surface of the object to be measured, with high precision. Three-dimensional display using realistic 3D graphics using 3D analysis software is also possible. It can perform 3D measurements such as non-contact shape measurement, surface roughness measurement, and 3D measurement, allowing accurate non-contact shape measurement of objects that cannot be measured with contact surface roughness meters or general 3D measuring instruments. is possible.
■Non-contact high-precision shape measurement system that can be used with commercially available laser displacement sensors
・Achieve low cost by using commercially available laser displacement sensors
・Measurement principle
■Able to analyze all surface shapes such as cross-sectional shape, surface roughness, surface area, volume, etc.
- Simple operation that anyone can use.
・Measurement data can be expanded as is in Excel
■XY measurement range is standard type and supports □300mm wide area.
・□3 types available from 100mm to 300mm
・Stage can be customized according to your request
■Three types of measurement methods allow you to perform measurements that match your application.
・Equal pitch measurement (stop)
・Equal pitch measurement (continuous)
・Multiple area measurement
■Application
Realistic 3D graphic analysis is possible using 3D analysis software.
■Typical usage examples
・LCD industry
・Semiconductor industry
・Mobile terminal industry
・Printer industry
・Automotive industry
・Other industries
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Product
3D measuring instrument High precision 3D shape measurement system E-Measure3d series (commercially available sensor type)
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Handling Company
COMS Co., Ltd.
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Categories
1 Models of 3D measuring instrument High precision 3D shape measurement system E-Measure3d series (commercially available sensor type)
| Product Image | Part Number | Price (excluding tax) | Analysis software department Compatible equipment | Analysis software department basic profile | Analysis software part model | Analysis software section display | Automated stage system section Repeatable positioning accuracy | Automated stage system section external dimensions | Automatic stage system department Lost motion | Automatic stage system department backlash | Automatic stage system movement amount | Automatic stage system part weight | Automatic stage system positioning accuracy | Automatic stage system section feeding method | Automatic stage system section guide method | Automatic stage system section load capacity | Automatic stage system section movement direction | Automatic stage system section sample stage size | Automatic stage system section sensor head position adjustment | Automatic stage system straightness (horizontal/vertical) | Automatic stage system unit minimum movement resolution | Controller part positioning control | Controller section Displacement sensor data collection | Laser displacement sensor measurement accuracy | Laser displacement sensor part measurement area | Measurement software part model | Measurement software section Compatible equipment | Measurement software section Measurement settings | Measurement software section Save file format | Measurement software section basic functions | Measurement software section data conversion | Measurement software section equipment settings |
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EMS-3D 100XY |
Available upon quote | PC (Supported OS Windows 10 Japanese version) | Height, width, area, diagonal, surface area, roughness Ra, roughness Rzjis, cutoff value setting, roughness curve display, waviness curve display, cursor tracking setting, tilt correction | 3D measurement | 3D/2D graph display and numerical analysis of shapes | ±1μm | 370×390×347(H)mm | 3μm | 2μm | 100×100mm | Approximately 15kg | 4μm (at 10mm stroke), 18μm (at full stroke) | Precision ball screw lead 2mm | High rigidity linear ball guide | 14kg | XY axis | 120×120mm | Rack and pinion type Z-axis manual stage | 2μm (at 30mm stroke), 10μm (at full stroke) | 0.1μm (when the number of divisions is set to 40) | 3-axis controller with built-in driver CP-700M | AIO-163202FX-USB |
Measurement resolution 0.01μm, repeatability 0.01μm *This is an example of the accuracy of a single laser displacement sensor that can be installed in this system. Actual accuracy varies depending on sensor type, settings, measurement target, usage environment, etc. |
Measurement reference distance 10mm, measurement range ±1mm *This is an example of the accuracy of a single laser displacement sensor that can be installed in this system. Actual accuracy varies depending on sensor type, settings, measurement target, usage environment, etc. |
E-Measure3D | Our automatic stage system controller, displacement sensor with analog voltage output, PC (compatible OS Windows 10 Japanese version) | Equal pitch (stop) measurement/equal pitch (continuous) measurement/multiple area measurement | TDV, emd | Automatic control of XY-axis automatic stage positioning and displacement sensor shape data collection | Display emd file on Excel using Excel converter | Drive detailed settings (drive speed, communication, display), AD conversion detailed settings (1 channel of collected data, voltage range, voltage value conversion, sign, decimal point) |
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About Company Handling This Product
- Japan