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  4. Wafer transfer machine compatible with both 6 and 8 inch wafers and SEMI standard wafer Automatic wafer transfer machine (Hugle Electronics Co., Ltd.)
Wafer transfer machine compatible with both 6 and 8 inch wafers and SEMI standard wafer Automatic wafer transfer machine-Automatic wafer transfer machine
Wafer transfer machine compatible with both 6 and 8 inch wafers and SEMI standard wafer Automatic wafer transfer machine-Hugle Electronics Co., Ltd.

Wafer transfer machine compatible with both 6 and 8 inch wafers and SEMI standard wafer Automatic wafer transfer machine
Hugle Electronics Co., Ltd.

Hugle Electronics Co., Ltd.'s Response Status

Response Rate

100.0%

Response Time

51.6hours

About This Product

This device is a wafer transfer machine compatible with both 6 and 8 inch wafers and SEMI standard wafers. The automatic carrier identification function, mapping function, and basic transfer pattern can be customized based on the customer's requested specifications, such as same slot transfer, upside-down slot transfer, specified slot transfer, recipe transfer, etc.

■Product overview

・In-house robot placed at the center of the equipment ・Career stage x 2 locations - Operation GUI touch panel on the front of the device (top/front selectable) ・Robot hand with mapping sensor ・Light curtain ・Signal tower ・Emergency stop button

■Options

・Wafer ID reading mechanism ・Edge grip specifications ・With stand ・Aligners (The photo shows aligners) *Please contact us separately for 12 inch specifications. *2-port/4-port sorter and microscope loader are also available.

  • Product

    Wafer transfer machine compatible with both 6 and 8 inch wafers and SEMI standard wafer Automatic wafer transfer machine

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1 Models of Wafer transfer machine compatible with both 6 and 8 inch wafers and SEMI standard wafer Automatic wafer transfer machine

Image Part Number Price (excluding tax) Power supply Weight Transfer time Vacuum Compatible cassette Compatible wafer Safety mechanism External dimensions Compressed air Control
Wafer transfer machine compatible with both 6 and 8 inch wafers and SEMI standard wafer Automatic wafer transfer machine-Part Number-Automatic wafer transfer machine

Automatic wafer transfer machine

Available upon quote

AC100V10A

Approximately 66kg

Approximately 3 minutes/25 images *With alignment: Approximately 8 minutes (without each mapping operation)

-53kPa or more

6 inch slot pitch 4.7625mm25 slots
8 inch slot pitch 6.35mm25 slots

6 inches (OF), 8 inches (V notch): Wafers that can be vacuum-adsorbed on the back side

Emergency stop button, LED laminated indicator light, curtain sensor
Cassette presence sensor, wafer protrusion sensor, maintenance cover detection sensor

840mm (W) x700mm (D) x625mm (H) *Excluding indicator lights, monitors, etc.

0.5MPa or more

Built-in Windows 1064bit, 10.1 inch touch panel, GUI

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About Company Handling This Product

Hugle Electronics Co., Ltd.

Response Rate

100.0%

Response Time

51.6hrs

  • Japan

Related search keywords

Semiconductor Manufacturing Equipment Component & Part Machining
Semiconductor Manufacturing Equipment Component & Part Machining　Hugle Electronics Co., Ltd.
Hugle Electronics Co., Ltd.

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