Wafer transfer machine compatible with both 6 and 8 inch wafers and SEMI standard wafer Automatic wafer transfer machine
Hugle Electronics Co., Ltd.
About This Product
This device is a wafer transfer machine compatible with both 6 and 8 inch wafers and SEMI standard wafers. The automatic carrier identification function, mapping function, and basic transfer pattern can be customized based on the customer's requested specifications, such as same slot transfer, upside-down slot transfer, specified slot transfer, recipe transfer, etc.
■Product overview
・In-house robot placed at the center of the equipment
・Career stage x 2 locations
- Operation GUI touch panel on the front of the device (top/front selectable)
・Robot hand with mapping sensor
・Light curtain
・Signal tower
・Emergency stop button
■Options
・Wafer ID reading mechanism
・Edge grip specifications
・With stand
・Aligners (The photo shows aligners)
*Please contact us separately for 12 inch specifications.
*2-port/4-port sorter and microscope loader are also available.
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Product
Wafer transfer machine compatible with both 6 and 8 inch wafers and SEMI standard wafer Automatic wafer transfer machine
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Handling Company
Hugle Electronics Co., Ltd.
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Categories
1 Models of Wafer transfer machine compatible with both 6 and 8 inch wafers and SEMI standard wafer Automatic wafer transfer machine
| Product Image | Part Number | Price (excluding tax) | Compatible cassette | Compatible wafer | Compressed air | Control | External dimensions | Power supply | Safety mechanism | Transfer time | Vacuum | Weight |
|---|---|---|---|---|---|---|---|---|---|---|---|---|
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Automatic wafer transfer machine |
Available upon quote |
6 inch slot pitch 4.7625mm25 slots 8 inch slot pitch 6.35mm25 slots |
6 inches (OF), 8 inches (V notch): Wafers that can be vacuum-adsorbed on the back side | 0.5MPa or more | Built-in Windows 1064bit, 10.1 inch touch panel, GUI | 840mm (W) x700mm (D) x625mm (H) *Excluding indicator lights, monitors, etc. | AC100V10A |
Emergency stop button, LED laminated indicator light, curtain sensor Cassette presence sensor, wafer protrusion sensor, maintenance cover detection sensor |
Approximately 3 minutes/25 images *With alignment: Approximately 8 minutes (without each mapping operation) | -53kPa or more | Approximately 66kg |
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