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  4. Reticle compatible cleaning device EUVPOD fully automatic cleaning system SR-EUV (REN) (Hugle Electronics Co., Ltd.)
Reticle compatible cleaning device EUVPOD fully automatic cleaning system SR-EUV (REN)-SR-EUV (REN)
Reticle compatible cleaning device EUVPOD fully automatic cleaning system SR-EUV (REN)-Hugle Electronics Co., Ltd.

Reticle compatible cleaning device EUVPOD fully automatic cleaning system SR-EUV (REN)
Hugle Electronics Co., Ltd.

About This Product

This is a fully automatic cleaning device (patented) for EUVPOD used in EUV exposure, the latest exposure technology. In addition to disassembly/reassembly of InnerPOD and OuterPOD, each POD is cleaned/dryed in a separate dedicated CH. Completely unmanned operation is also possible. We achieve nano-level particle removal using our unique cleaning/drying technology that we have built over 30 years as a manufacturer of semiconductor device container cleaning equipment.

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    Reticle compatible cleaning device EUVPOD fully automatic cleaning system SR-EUV (REN)

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1 Models of Reticle compatible cleaning device EUVPOD fully automatic cleaning system SR-EUV (REN)

Product Image Part Number Price (excluding tax) Device body
Reticle compatible cleaning device EUVPOD fully automatic cleaning system SR-EUV (REN)-Part Number-SR-EUV (REN)

SR-EUV (REN)

Available upon quote 1,230 (W) ×2,900 (D) ×2,300 (H) mm (excluding protrusions)

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About Company Handling This Product

Hugle Electronics Co., Ltd.

  • Japan

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Semiconductor Cleaning Equipment
Semiconductor Cleaning Equipment　Hugle Electronics Co., Ltd.
Hugle Electronics Co., Ltd.

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