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  3. Semiconductor Cleaning Equipment
  4. Reticle compatible cleaning device RSP200/150 Fully automatic cleaning system SR-200/150 (REN) (Hugle Electronics Co., Ltd.)
Reticle compatible cleaning device RSP200/150 Fully automatic cleaning system SR-200/150 (REN)-SR-200/150
Reticle compatible cleaning device RSP200/150 Fully automatic cleaning system SR-200/150 (REN)-Hugle Electronics Co., Ltd.

Reticle compatible cleaning device RSP200/150 Fully automatic cleaning system SR-200/150 (REN)
Hugle Electronics Co., Ltd.

Hugle Electronics Co., Ltd.'s Response Status

Response Rate

100.0%

Response Time

51.6hours

About This Product

This is a fully automatic cleaning system for RSP200 and RSP150, which are specialized containers for reticles. This device is equipped with high cleaning performance and achieves nano-level particle removal. Our main concepts are precision cleaning and space saving, and we support the creation of an efficient production environment.

■Product overview

・Footprint saving design ・Ultra-precision cleaning using unique cleaning technology ・Complete drying achieved by high-efficiency drying method ・Prevention of cross contamination by fully automatic POD opening/closing ・Compatible with RSP-200/150 of each manufacturer ・Built-in robot hand self-cleaning system

  • Product

    Reticle compatible cleaning device RSP200/150 Fully automatic cleaning system SR-200/150 (REN)

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1 Models of Reticle compatible cleaning device RSP200/150 Fully automatic cleaning system SR-200/150 (REN)

Image Part Number Price (excluding tax) Device body
Reticle compatible cleaning device RSP200/150 Fully automatic cleaning system SR-200/150 (REN)-Part Number-SR-200/150

SR-200/150

Available upon quote

1,230mm (W) ✕2,115mm (L) ✕2,185mm (H) *Excluding protrusions

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About Company Handling This Product

Hugle Electronics Co., Ltd.

Response Rate

100.0%

Response Time

51.6hrs

  • Japan

Related search keywords

Semiconductor Cleaning Equipment
Semiconductor Cleaning Equipment　Hugle Electronics Co., Ltd.
Hugle Electronics Co., Ltd.

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