Reticle compatible cleaning device RSP200/150 Fully automatic cleaning system SR-200/150 (REN)
Hugle Electronics Co., Ltd.
About This Product
This is a fully automatic cleaning system for RSP200 and RSP150, which are specialized containers for reticles. This device is equipped with high cleaning performance and achieves nano-level particle removal. Our main concepts are precision cleaning and space saving, and we support the creation of an efficient production environment.
■Product overview
・Footprint saving design
・Ultra-precision cleaning using unique cleaning technology
・Complete drying achieved by high-efficiency drying method
・Prevention of cross contamination by fully automatic POD opening/closing
・Compatible with RSP-200/150 of each manufacturer
・Built-in robot hand self-cleaning system
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Product
Reticle compatible cleaning device RSP200/150 Fully automatic cleaning system SR-200/150 (REN)
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Handling Company
Hugle Electronics Co., Ltd.
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Categories
1 Models of Reticle compatible cleaning device RSP200/150 Fully automatic cleaning system SR-200/150 (REN)
| Product Image | Part Number | Price (excluding tax) | Device body |
|---|---|---|---|
|
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SR-200/150 |
Available upon quote | 1,230mm (W) ✕2,115mm (L) ✕2,185mm (H) *Excluding protrusions |
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