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  4. 8 inches or less Cleaning equipment Cassette box Fully automatic cleaning system SC-8 (Hugle Electronics Co., Ltd.)
8 inches or less Cleaning equipment Cassette box Fully automatic cleaning system SC-8-SC-8
8 inches or less Cleaning equipment Cassette box Fully automatic cleaning system SC-8-Hugle Electronics Co., Ltd.

8 inches or less Cleaning equipment Cassette box Fully automatic cleaning system SC-8
Hugle Electronics Co., Ltd.

About This Product

This device was developed as a successor to the CRD-4500, and is an automatic cleaning system that can handle up to 8" wafer carriers and boxes. The cleaning target is set on a special tray, and efficient cleaning/drying is performed in each processing chamber. The wire tray is transported using Hugle's unique special roller system that is designed to prevent particles.

■Product overview

・Available for various types of containers ・Space-saving/energy-saving design ・Hugle's unique ultra-precision cleaning ・Highly efficient hot air knife drying for complete drying ・Various options available ・Compliant with SEMI S2, S8, CE standards

  • Product

    8 inches or less Cleaning equipment Cassette box Fully automatic cleaning system SC-8

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1 Models of 8 inches or less Cleaning equipment Cassette box Fully automatic cleaning system SC-8

Image Part Number Price (excluding tax) Device body
8 inches or less Cleaning equipment Cassette box Fully automatic cleaning system SC-8-Part Number-SC-8

SC-8

Available upon quote

2,630 (W) ×1,170 (D) ×1,706 (H) mm (excluding protrusions)

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About Company Handling This Product

Hugle Electronics Co., Ltd.

  • Japan

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Semiconductor Cleaning Equipment
Semiconductor Cleaning Equipment　Hugle Electronics Co., Ltd.
Hugle Electronics Co., Ltd.

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