8 inches or less Cleaning equipment Cassette box Fully automatic cleaning system SC-8
Hugle Electronics Co., Ltd.
About This Product
This device was developed as a successor to the CRD-4500, and is an automatic cleaning system that can handle up to 8" wafer carriers and boxes. The cleaning target is set on a special tray, and efficient cleaning/drying is performed in each processing chamber. The wire tray is transported using Hugle's unique special roller system that is designed to prevent particles.
■Product overview
・Available for various types of containers
・Space-saving/energy-saving design
・Hugle's unique ultra-precision cleaning
・Highly efficient hot air knife drying for complete drying
・Various options available
・Compliant with SEMI S2, S8, CE standards
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Product
8 inches or less Cleaning equipment Cassette box Fully automatic cleaning system SC-8
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Handling Company
Hugle Electronics Co., Ltd.
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Categories
1 Models of 8 inches or less Cleaning equipment Cassette box Fully automatic cleaning system SC-8
| Product Image | Part Number | Price (excluding tax) | Device body |
|---|---|---|---|
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SC-8 |
Available upon quote | 2,630 (W) ×1,170 (D) ×1,706 (H) mm (excluding protrusions) |
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