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  3. Semiconductor Cleaning Equipment
  4. 8 inch compatible cleaning device SMIF POD manual cleaning system IA-8 (Hugle Electronics Co., Ltd.)
8 inch compatible cleaning device SMIF POD manual cleaning system IA-8-IA-8
8 inch compatible cleaning device SMIF POD manual cleaning system IA-8-Hugle Electronics Co., Ltd.

8 inch compatible cleaning device SMIF POD manual cleaning system IA-8
Hugle Electronics Co., Ltd.

Hugle Electronics Co., Ltd.'s Response Status

Response Rate

100.0%

Response Time

51.6hours

About This Product

This is a front touch panel type manual cleaning machine developed for precision cleaning and drying of 8-inch SMIFPOD. The IA-8 is a cleaning and drying device that is ideal for research and pilot lines, and is equipped with advanced knowledge and the latest technology that only a manufacturer of container cleaning equipment can provide. IA-8 also allows cleaning and drying of cassettes.

■Product overview

・Simultaneous pure water jet cleaning of the inside and outside surfaces of the SMIFPOD cover and the inside of the base ・Air knife hot air drying ・The pod is rotated and the nozzle placed at close range performs precise cleaning and drying. ・Drain a small amount of pure water when not cleaning to prevent bacteria from forming. ・Easy operation with touch panel ・Controller using sequencer method ・Various worker-friendly safety devices ・Easy maintenance ・Various optional designs available to suit your needs

  • Product

    8 inch compatible cleaning device SMIF POD manual cleaning system IA-8

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1 Models of 8 inch compatible cleaning device SMIF POD manual cleaning system IA-8

Image Part Number Price (excluding tax) Power supply Weight Pure water flow rate Pure water pressure Drainage Exhaust External dimensions Processing time Processing target Set method CDA (clean dry air) flow rate CDA (clean dry air) pressure
8 inch compatible cleaning device SMIF POD manual cleaning system IA-8-Part Number-IA-8

IA-8

Available upon quote

3 phase, 200VAC (with earth), 8KVA, 50/60Hz

300kg

10 liters/min (minimum required flow rate)

0.1Mpa

Flow rate 40 liters/min or more

Displacement 2,000NL/min or more

1,300 (W) ×70 (D) ×1,580 (H) mm (when chamber door is open)

1 set/15 minutes

8 inch SMIFPOD/8 inch cassette

Manual

1,600NL/min

0.7Mpa

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About Company Handling This Product

Hugle Electronics Co., Ltd.

Response Rate

100.0%

Response Time

51.6hrs

  • Japan

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Semiconductor Cleaning Equipment
Semiconductor Cleaning Equipment　Hugle Electronics Co., Ltd.
Hugle Electronics Co., Ltd.

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