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  3. Semiconductor Cleaning Equipment
  4. 12 inch compatible cleaning device FOUP/FOSB manual cleaning system IF-12 (Hugle Electronics Co., Ltd.)
12 inch compatible cleaning device FOUP/FOSB manual cleaning system IF-12-IF-12
12 inch compatible cleaning device FOUP/FOSB manual cleaning system IF-12-Hugle Electronics Co., Ltd.

12 inch compatible cleaning device FOUP/FOSB manual cleaning system IF-12
Hugle Electronics Co., Ltd.

About This Product

We live in an era where the concept of maintaining and improving high productivity in semiconductor manufacturing by cleaning FOUPs and FOSBs is essential. IF-12 is capable of cleaning/drying various FOUP/FOSB with one unit. Hugle's unique chamber structure eliminates the need for any process kit changes or setup changes.

■Product overview

・High throughput (compared to our old model) ・Save footprint ・Static charge removal/dust removal measures ・Precision cleaning using nozzle jet cleaning ・Complete drying in a short time using hot air knife drying ・Equipped with dead water prevention function ・Automatic FOUP Opner mechanism can be added (Option)

  • Product

    12 inch compatible cleaning device FOUP/FOSB manual cleaning system IF-12

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1 Models of 12 inch compatible cleaning device FOUP/FOSB manual cleaning system IF-12

Image Part Number Price (excluding tax) Device body
12 inch compatible cleaning device FOUP/FOSB manual cleaning system IF-12-Part Number-IF-12

IF-12

Available upon quote

2,300 (W) ×1,400 (D) ×2,200 (H) mm (excluding protrusions)

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About Company Handling This Product

Hugle Electronics Co., Ltd.

  • Japan

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Semiconductor Cleaning Equipment
Semiconductor Cleaning Equipment　Hugle Electronics Co., Ltd.
Hugle Electronics Co., Ltd.

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