Digital mass flow controller/meter GF100 series
Regal Joint Co., Ltd.
About This Product
■Features
・Select and change gas type and full-scale flow range using MultiFlo technology
・User-friendly interface with diagnostic functions and service port
・Long-term stable performance with corrosion-resistant Hastelloy T-Rise sensor
・Achieved ultra-fast settling time of 300ms (GF125 / GF135)
・SDS (Safty Delivery System), HA (High Precision) option
・Excellent pressure fluctuation resistance with PTI (Pressure Transient Insesitivity) function (GF125 / GF135)
・Maintenance-free structure with no mechanical moving parts.
・Equipped with real-time gas flow abnormality diagnosis and detection function (GF135)
・Pipe extensions and connection fittings are also available upon request.
■Applications
・Etcher, CVD, and diffusion furnace for cutting-edge semiconductor manufacturing processes
・Cutting-edge compound semiconductor MO-CVD
・OEM / Gas lines used by MultiFlo support for various gas types and flow ranges / Reduced amount of spare inventory
・Reducing the size and weight of the gas system using the PTI function
・Long-term stable flow control of critical process gases with gas flow abnormality diagnosis and detection function
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Product
Digital mass flow controller/meter GF100 series
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Handling Company
Regal Joint Co., Ltd.
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Categories
1 Models of Digital mass flow controller/meter GF100 series
| Product Image | Part Number | Price (excluding tax) |
|---|---|---|
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GF100 |
Available upon quote |
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About Company Handling This Product
- Japan