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  4. Digital mass flow controller/meter GF100 series (Regal Joint Co., Ltd.)
Digital mass flow controller/meter GF100 series-GF100
Digital mass flow controller/meter GF100 series-Regal Joint Co., Ltd.

Digital mass flow controller/meter GF100 series
Regal Joint Co., Ltd.

About This Product

■Features

・Select and change gas type and full-scale flow range using MultiFlo technology ・User-friendly interface with diagnostic functions and service port ・Long-term stable performance with corrosion-resistant Hastelloy T-Rise sensor ・Achieved ultra-fast settling time of 300ms (GF125 / GF135) ・SDS (Safty Delivery System), HA (High Precision) option ・Excellent pressure fluctuation resistance with PTI (Pressure Transient Insesitivity) function (GF125 / GF135) ・Maintenance-free structure with no mechanical moving parts. ・Equipped with real-time gas flow abnormality diagnosis and detection function (GF135) ・Pipe extensions and connection fittings are also available upon request.

■Applications

・Etcher, CVD, and diffusion furnace for cutting-edge semiconductor manufacturing processes ・Cutting-edge compound semiconductor MO-CVD ・OEM / Gas lines used by MultiFlo support for various gas types and flow ranges / Reduced amount of spare inventory ・Reducing the size and weight of the gas system using the PTI function ・Long-term stable flow control of critical process gases with gas flow abnormality diagnosis and detection function

  • Product

    Digital mass flow controller/meter GF100 series

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1 Models of Digital mass flow controller/meter GF100 series

Image Part Number Price (excluding tax) Surface roughness Repeatability and reproducibility Accuracy Flow rate Responsiveness External leak rate Ambient temperature range P.T.I. Multi-Flo I/O
Digital mass flow controller/meter GF100 series-Part Number-GF100

GF100

Available upon quote

0.25μm

< ±0.15%R.D.

±1% S.P. (35 ~ 100%FS)
±0.35%F.S. (2 ~ 35%FS)

3 sccm F.S ~ 50 slm N2 conversion

1s or less

1×10^-12 Pa・m^3 /s (He) or less

10~50℃

Not supported

Option

0~5 Vdc/RS485/DeviceNet

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Regal Joint Co., Ltd.

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