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  4. Static electricity dissipation alumina membrane (Aszac Co., Ltd.)
Static electricity dissipation alumina membrane-Static electricity dissipation alumina membrane
Static electricity dissipation alumina membrane-Aszac Co., Ltd.

Static electricity dissipation alumina membrane
Aszac Co., Ltd.

Aszac Co., Ltd.'s Response Status

Response Rate

100.0%

Response Time

61.1hours

About This Product

A special alumina coat that conducts electricity easily. It can be applied to the surface of regular alumina products to add a static neutralizing effect. Ceramics are widely used as "insulating materials" that basically do not conduct electricity. However, in the case of ceramic transfer hands, depending on the usage environment, static electricity may build up on the robot hand, causing damage to the minute circuits on the wafer. Therefore, Aszac focused on applying a conductive coating to the surface of the alumina hand in order to make it easier for the static electricity charged on the robot hand to dissipate, and through repeated demonstration experiments, succeeded in lowering the surface resistance value. Normally, the surface resistance value of alumina as an insulating material is 1.0×1015 Ω, but it can be lowered to 1.0×106 to 1.0×1010 Ω by coating.

■This black static electricity dissipating alumina film has many other benefits.

- Covers surface resistance values ​​that are effective for static electricity countermeasures. ・Excellent conductivity, heat resistance, and adhesion than fluororesin coatings. ・Low cost compared to SiC. ・Since it is a coat treatment, you can apply only the amount you need when you need it. ・Black color has the effect of preventing light reflection, making it ideal for parts for optical-related applications. ・Since it is made of high-purity alumina, it can prevent the occurrence of contamination. Measures can be taken not only for the transfer hand, but also for the wafer push-up pin, chamber internal parts, etc. An ivory coat color is also available as an option. You can choose it if you need to harmonize with the alumina color of surrounding parts.

■Features

・Has a surface resistance value that is effective as a countermeasure against static electricity. ・Less risk of particles and contamination ・High heat resistance

  • Product

    Static electricity dissipation alumina membrane

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1 Models of Static electricity dissipation alumina membrane

Image Part Number Price (excluding tax) Purpose Material
Static electricity dissipation alumina membrane-Part Number-Static electricity dissipation alumina membrane

Static electricity dissipation alumina membrane

Available upon quote

For wafer transfer (atmosphere/vacuum)

Alumina

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About Company Handling This Product

Aszac Co., Ltd.

Response Rate

100.0%

Response Time

61.1hrs

  • Japan

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