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  4. Ceramic products High purity alumina ceramics that can withstand harsh conditions (SAPPHAL?) (M.WATANABE & CO.,LTD.)
Ceramic products High purity alumina ceramics that can withstand harsh conditions (SAPPHAL?)-SAPPHAL?
Ceramic products High purity alumina ceramics that can withstand harsh conditions (SAPPHAL?)-M.WATANABE & CO.,LTD.

Ceramic products High purity alumina ceramics that can withstand harsh conditions (SAPPHAL?)
M.WATANABE & CO.,LTD.

About This Product

A strong person who can withstand harsh conditions in an F-type plasma atmosphere. Polycrystalline alumina with properties similar to sapphire. It is a dense sintered body with high purity and almost no pores. In addition, because it has a uniform structure with uniform crystal grain size, it can withstand the harsh environment of plasma atmosphere.

■Basic information

Translucent alumina ceramics, which have properties similar to sapphire (single crystal alumina), have been used as lighting components for sodium lamps and other devices because they diffusely transmit most of the visible light. CoorsTek has focused on the high purity of translucent alumina ceramics and its excellent corrosion resistance against fluorine gases, and has developed a new use for it as a component for semiconductor devices. SAPPHAL? is highly pure, and at the same time has a uniform structure with a density that is extremely close to true density without pores and a uniform crystal grain size, so it can withstand the harsh environment of a plasma atmosphere. In addition, it has become possible to manufacture products with complex shapes and large sizes, which were previously considered difficult, and further applications are expected.

■Features

・High purity (Al2O3; 99.97%) ・High corrosion resistance to halogen plasma ・Theoretical density of alumina (3.99g/cm3) ・Deposited film is difficult to peel off

■Main use: Materials for plasma etching process

・Shower plate ・Susceptor ・Insulator ·nozzle ・Bell jar ·dome

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    Ceramic products High purity alumina ceramics that can withstand harsh conditions (SAPPHAL?)

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1 Models of Ceramic products High purity alumina ceramics that can withstand harsh conditions (SAPPHAL?)

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SAPPHAL?

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About Company Handling This Product

M.WATANABE & CO.,LTD.

Company Overview

M.Watanabe Co., Ltd., founded in 1953 with headquarters in Koga City, Japan, is a manufacturer of semiconducto...

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