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  4. X-ray wafer bump automatic inspection equipment Six-3000 (iBit Co., Ltd.)
X-ray wafer bump automatic inspection equipment Six-3000-Six-3000
X-ray wafer bump automatic inspection equipment Six-3000-iBit Co., Ltd.

X-ray wafer bump automatic inspection equipment Six-3000
iBit Co., Ltd.

About This Product

An automatic X-ray inspection device that automatically inspects solder bumps on wafers.

■Features

・A device that uses X-rays to visually inspect the internal state of microbumps on wafers ・Inspect the presence or absence of voids (bubbles) within the bump, automatically measure the dimensions of the void, and make an NG judgment if the void exceeds the allowable value. - Automatically takes out the FOUP, automatically supplies it to the X-ray device, automatically inspects it, and automatically stores it fully automatically. Automatic inspection possible with registered recipes ・Uses a nanofocus X-ray tube with a focal diameter of 0.25μm, and uses a high resolution 4MB (16bit) X-ray camera, achieving a spatial resolution of 0.25μm. ・Inspectable bump size: φ10μm or more ・Inspectable void size: Depends on bump height (for bump height 20μm, φ2μm or more)

■Inspection items

・Bump diameter measurement ・Void measurement ・Bump height measurement ・Bump shape inspection ・Automatic observation of wafer bumps

  • Product

    X-ray wafer bump automatic inspection equipment Six-3000

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1 Models of X-ray wafer bump automatic inspection equipment Six-3000

Image Part Number Price (excluding tax) Equipment weight Equipment dimensions Vacuum Compatible wafer dimensions Compressed air supply Power supply X-ray tube type X-ray leakage dose X-ray image receiving section
X-ray wafer bump automatic inspection equipment Six-3000-Part Number-Six-3000

Six-3000

Available upon quote

2,000kg

2,210 (W) × 1,500 (D) × 1,770 (H) mm

−56kPa 20N/min Connection size ⌀4 (one-touch fitting)

12 inches

Supply pressure 0.5Mpa or more Connection diameter ⌀ 8 connections (one-touch joint)

3 phase AC200V, 6KVA

Microfocus sealed X-ray source (water-cooled)

1μSv/h or less, no X-ray handling qualification required

16 million pixel high resolution flat panel

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About Company Handling This Product

iBit Co., Ltd.

  • Japan

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X-ray Inspection System　iBit Co., Ltd.
iBit Co., Ltd.

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