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  4. Silicon wafer crystal defect void inspection equipment X-CAS-2 (iBit Co., Ltd.)
Silicon wafer crystal defect void inspection equipment X-CAS-2-X-CAS-2
Silicon wafer crystal defect void inspection equipment X-CAS-2-iBit Co., Ltd.

Silicon wafer crystal defect void inspection equipment X-CAS-2
iBit Co., Ltd.

About This Product

Fully automatic inspection equipment for crystal defect poids (gaps) inside silicon wafers.

■Features

・This device automatically inspects voids, which are crystal defects in silicon wafers, using X-rays. - A similar inspection method using infrared rays exists, but there are conditions such as it is difficult to inspect wafers with low resistance values, and accurate inspection is only possible with polished wafers that have been polished in the final process. X-ray inspection methods do not require such conditions and can be inspected even before polishing (immediately after slicing). In addition, inspection is possible regardless of the resistance value of the wafer. ・The size of silicon wafers to be inspected is 12 inches and 8 inches. (6 inch is optional) ・About safety: No special qualifications such as X-ray work supervisor are required. X-rays are completely blocked, so it is safe to use.

■Inspection items

・Automatic observation of wafer bumps ・Voids, which are crystal defects in silicon wafers ・6/8/12 inch silicon wafer

  • Product

    Silicon wafer crystal defect void inspection equipment X-CAS-2

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1 Models of Silicon wafer crystal defect void inspection equipment X-CAS-2

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Silicon wafer crystal defect void inspection equipment X-CAS-2-Part Number-X-CAS-2

X-CAS-2

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iBit Co., Ltd.

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