Surface roughness measuring device 3D white interference microscope from sub-nano roughness to millimeter roughness Non-contact 3D surface roughness/shape measuring device Opt-scope
Meishin Koki Co., Ltd.
About This Product
■Summary
・3D white interference microscope for measuring nano-level surface properties
・Measure the surface roughness and shape of machined parts in a short time without contact
Features
■High efficiency
Measures three-dimensional surface texture in a short time. Time can be reduced by more than 100 times compared to contact-type measuring machines
■Stability
Tokyo Seimitsu's unique white interference fringe peak detection algorithm (DEAP) obtains stable shape data from fine roughness shapes to machined surfaces.
■Easy to operate
Abundant analysis and outstanding operability using the well-established ACCTee and SurfcomMap
■Recommended for the following industries
・Machined parts (surface quality evaluation of machined surfaces such as milling cutters)
・Semiconductor related (wafer)
・Rubber roller
・Whetstone grain analysis
- Textured resin molded products, etc.
■Focus variation measurement function
・High-speed scanning of millimeter shapes
・A focus variation measurement function using all-focus imaging microscopy (focus variation microscopy), which is specified as a measurement method in the three-dimensional surface texture international standard ISO 25178-6:2010, has been added as a new option. (factory option)
■Measurement can be completed in a short time due to white interference method
Using the principle of white interference, the surface roughness and shape of machined parts can be measured non-contact and in a short time. Since there is no need for scanning in the X and Y axes, which is required with stylus-type three-dimensional surface roughness measuring machines, the measurement speed is overwhelmingly fast and measurements can be completed in a short time.
■Unique white interference fringes
Peak detection method DEAP Deep (Algorithm for Detection of Envelope and Absolute Phase) is Tokyo Seimitsu's unique envelope/absolute phase detection algorithm. It has a wider measurement range than PSI (phase shift interferometry), higher resolution and wider measurement range than VSI (vertical scanning interferometry), and calculates envelopes with higher sensitivity. Deep's measurement noise reduction effect provides overwhelming effective resolution, making it possible to obtain clearer shape data even on sloped surfaces of machined parts that were previously difficult to measure.
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Product
Surface roughness measuring device 3D white interference microscope from sub-nano roughness to millimeter roughness Non-contact 3D surface roughness/shape measuring device Opt-scope
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Handling Company
Meishin Koki Co., Ltd.
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Categories
1 Models of Surface roughness measuring device 3D white interference microscope from sub-nano roughness to millimeter roughness Non-contact 3D surface roughness/shape measuring device Opt-scope
| Product Image | Part Number | Price (excluding tax) | Air source (with passive vibration isolation) | Body mass | CCD resolution (X,Y) | Environmental temperature | Image sensor | Indication accuracy (Z) | Lens mounting method | Light source | Maximum measurement height | Maximum measurement workpiece height Tilt table | Maximum measurement workpiece height When XY table is installed | Measurement principle | Measuring range (X,Y) | Measuring unit external dimensions Width/Depth/Height | Number of CCD pixels | Power consumption | Resolution (Z) | Scanning range (Z) | Scanning speed | Sq repeatability σ | Step repeatability σ | Temperature change | Tilt table loadable weight | Tilt table tilt range | Vertical display resolution | Vibration isolation table | Voltage | XY electric stage stroke | XY motorized stage loadable weight | Z-axis indication accuracy |
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Opt-scope R |
Available upon quote | Supply pressure 0.35 - 0.7 Mpa |
175kg With column spacer option: 183 kg |
1.10μm | 18~30℃ |
Color CMOS image sensor *Optional function Monochrome CMOS image sensor |
0.8±｜2H/100｜μm | 5 hole revolver type | White LED | 200mm | 159 mm (with column spacer option: 289 mm *optional function) | 58 mm (with column spacer option: 188 mm *optional function) |
Vertical scanning low coherence interferometry All-in-focus imaging microscopy (focus variation) *Optional feature |
Approximately 1.7×1.7mm |
620mm / 800mm / 1,532mm With column spacer option: 620 mm / 800 mm / 1,662 mm |
2,048×2,048 | 1,200W | 0.1nm | 20mm |
2 ~ 100 µm/sec 1 ~ 12 µm/sec |
0.005nm | 0.05% | ±0.5℃/hour | 20kg | ± 1° | 0.01nm | Passive method or active method *Optional function | Single phase AC100/110±10% (50/60 Hz) | ±12.5 mm or ±25 mm *Optional function | 14kg *Optional function | 0.1 +|H/1,000| µm (H: measurement height µm) |
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About Company Handling This Product
- Japan