All Categories

History

  1. Metoree
  2. Analyzers
  3. Thermal Desorption Analyzers
  4. Ultra-sensitive detection of low concentration hydrogen in semiconductor substrates and thin films, development of hydrogen sensor elements Ultra-sensitive thermal desorption analyzer HEMTO-TDS (Tokyo Instruments, Inc)
Ultra-sensitive detection of low concentration hydrogen in semiconductor substrates and thin films, development of hydrogen sensor elements Ultra-sensitive thermal desorption analyzer HEMTO-TDS-Ultra-high sensitivity thermal desorption analyzer HEMTO-TDS
Ultra-sensitive detection of low concentration hydrogen in semiconductor substrates and thin films, development of hydrogen sensor elements Ultra-sensitive thermal desorption analyzer HEMTO-TDS-Tokyo Instruments, Inc

Ultra-sensitive detection of low concentration hydrogen in semiconductor substrates and thin films, development of hydrogen sensor elements Ultra-sensitive thermal desorption analyzer HEMTO-TDS
Tokyo Instruments, Inc

Tokyo Instruments, Inc's Response Status

Response Rate

100.0%

Response Time

36.5hours

About This Product

■Summary

This is a device that detects hydrogen contained in minute substrates and thin films using the thermal desorption method. By using a BeCu chamber with low hydrogen solid solution and efficiently heating only the sample substrate using an infrared laser, we can suppress the increase in hydrogen background during heating and increase the amount of hydrogen desorbed from the sample. This is a device that can measure with sensitivity. Additionally, since a quadrupole mass spectrometer is used for detection, it is possible to analyze desorbed substances other than hydrogen. The development of this device was promoted by the 103rd Ichimura Innovation Technology Foundation New Technology Development Grant, and is an industry-academia collaboration product with the Hosono Laboratory of the Tokyo Institute of Technology.

■Features

・Highly sensitive hydrogen detection ・Non-contact temperature control using laser heating

■Main uses

・Detection of low concentration hydrogen in semiconductor substrates ・Detection of hydrogen mixed in thin film ・Detection of thermal desorption of impurity elements in micro samples ・Determination of the binding state of absorption and adsorption

  • Product

    Ultra-sensitive detection of low concentration hydrogen in semiconductor substrates and thin films, development of hydrogen sensor elements Ultra-sensitive thermal desorption analyzer HEMTO-TDS

Share this product


20+ people viewing

Free
Get started with our free quotation service - no cost, no obligation.

No Phone Required
We respect your privacy. You can receive quotes without sharing your phone number.

1 Models of Ultra-sensitive detection of low concentration hydrogen in semiconductor substrates and thin films, development of hydrogen sensor elements Ultra-sensitive thermal desorption analyzer HEMTO-TDS

Image Part Number Price (excluding tax) Mass analysis range Sample size Temperature control Heating method Ionic current
Ultra-sensitive detection of low concentration hydrogen in semiconductor substrates and thin films, development of hydrogen sensor elements Ultra-sensitive thermal desorption analyzer HEMTO-TDS-Part Number-Ultra-high sensitivity thermal desorption analyzer HEMTO-TDS

Ultra-high sensitivity thermal desorption analyzer HEMTO-TDS

Available upon quote

1~100 amu

10mm×10mm

PID control using a radiation thermometer (emissivity is calibrated using a temperature calibration board with a thermocouple)
Temperature range 150℃~1,000℃
Temperature rising rate can be set arbitrarily from 10℃/min to 100℃/min

Infrared laser heating (983nm)

Can detect up to 1×10^-13A
Can detect hydrogen ion implanted substrates up to 1×10^15ion.cm2
5×10^16 atoms/cm3, detecting hydrogen atoms at a concentration of about 1/1 million

Customers who viewed this product also viewed

Reviews shown here are reviews of companies.

Oxygen Nitrogen Hydrogen Analyzer ONH836 Series-Cosmo Trading Co., Ltd.

Oxygen Nitrogen Hydrogen Analyzer ONH836 Series

Cosmo Trading Co., Ltd.

4.0

120+ people viewing

Last viewed: 10 hours ago

Response time: 24.30 hours

Thermal Desorption Analyzers

28 models listed

Hydrogen analyzer H836EN-Cosmo Trading Co., Ltd.

Hydrogen analyzer H836EN

Cosmo Trading Co., Ltd.

4.0

80+ people viewing

Last viewed: 11 hours ago

Response time: 24.30 hours

Thermal Desorption Analyzers

3 models listed

Hydrogen analyzer DH603-Cosmo Trading Co., Ltd.

Hydrogen analyzer DH603

Cosmo Trading Co., Ltd.

4.0

70+ people viewing

Last viewed: 11 hours ago

Response time: 24.30 hours

Thermal Desorption Analyzers

3 models listed

Semiconductor gas sensor PDHA-1000-Nissha FIS, Inc

Semiconductor gas sensor PDHA-1000

Nissha FIS, Inc

60+ people viewing

Last viewed: 5 hours ago

Response time: 26.25 hours

Thermal Desorption Analyzers

3 models listed

Semiconductor gas sensor PDHA-4000-Nissha FIS, Inc

Semiconductor gas sensor PDHA-4000

Nissha FIS, Inc

70+ people viewing

Last viewed: 16 hours ago

Response time: 26.25 hours

Thermal Desorption Analyzers

3 models listed

Ultra-high sensitivity thermal desorption analyzer HEMTO-TDS-Unisoku Co., Ltd.

Ultra-high sensitivity thermal desorption analyzer HEMTO-TDS

Unisoku Co., Ltd.

70+ people viewing

Response time: 51.68 hours

Thermal Desorption Analyzers
Inorganic analysis carbon/hydrogen/moisture analyzer RC612 type-LECO Japan LLC

Inorganic analysis carbon/hydrogen/moisture analyzer RC612 type

LECO Japan LLC

100+ people viewing

Last viewed: 10 hours ago

Thermal Desorption Analyzers

2 models listed

Inorganic analysis oxygen/nitrogen/hydrogen analyzer ONH836 type-LECO Japan LLC

Inorganic analysis oxygen/nitrogen/hydrogen analyzer ONH836 type

LECO Japan LLC

250+ people viewing

Last viewed: 11 hours ago

Thermal Desorption Analyzers

14 models listed

Inorganic analysis hydrogen analyzer model DH603-LECO Japan LLC

Inorganic analysis hydrogen analyzer model DH603

LECO Japan LLC

130+ people viewing

Last viewed: 11 hours ago

Thermal Desorption Analyzers

6 models listed

Inorganic analysis Hydrogen analyzer H836EN type-LECO Japan LLC

Inorganic analysis Hydrogen analyzer H836EN type

LECO Japan LLC

80+ people viewing

Last viewed: 11 hours ago

Thermal Desorption Analyzers

2 models listed

See More Thermal Desorption Analyzers Products

Other products of Tokyo Instruments, Inc

Reviews shown here are reviews of companies.

MPA100 melting point measuring device OptiMelt-Tokyo Instruments, Inc

MPA100 melting point measuring device OptiMelt

Tokyo Instruments, Inc

20+ people viewing

Last viewed: 12 hours ago

Response time: 36.51 hours

Melting Point Determination Apparatuses
Next-generation green laser LD-pumped high-power solid-state laser-Tokyo Instruments, Inc

Next-generation green laser LD-pumped high-power solid-state laser

Tokyo Instruments, Inc

30+ people viewing

Last viewed: 2 hours ago

Response time: 36.51 hours

Laser Light Sources

3 models listed

Excellent beam quality, high stability, modular type compact semiconductor laser Lambda Beam-Tokyo Instruments, Inc

Excellent beam quality, high stability, modular type compact semiconductor laser Lambda Beam

Tokyo Instruments, Inc

30+ people viewing

Last viewed: 5 hours ago

Response time: 36.51 hours

Laser Diodes

3 models listed

Lambda mini, a small diode laser equipped with a controller and USB power supply-Tokyo Instruments, Inc

Lambda mini, a small diode laser equipped with a controller and USB power supply

Tokyo Instruments, Inc

30+ people viewing

Last viewed: 5 hours ago

Response time: 36.51 hours

Laser Diodes

2 models listed

Ideal replacement for He-Cd lasers 320nm, up to 200mW, narrow linewidth, excellent frequency stability CW single frequency DPSS laser-Tokyo Instruments, Inc

Ideal replacement for He-Cd lasers 320nm, up to 200mW, narrow linewidth, excellent frequency stability CW single frequency DPSS laser

Tokyo Instruments, Inc

40+ people viewing

Response time: 36.51 hours

Laser Light Sources

2 models listed

Ideal for atomic clocks, oscillating at the transition frequency of strontium and rubidium Ultra-narrow linewidth CW (continuous wave) laser for quantum technology Solo QT-Tokyo Instruments, Inc

Ideal for atomic clocks, oscillating at the transition frequency of strontium and rubidium Ultra-narrow linewidth CW (continuous wave) laser for quantum technology Solo QT

Tokyo Instruments, Inc

30+ people viewing

Last viewed: 5 hours ago

Response time: 36.51 hours

Laser Light Sources
Blue high power semiconductor laser PLS series-Tokyo Instruments, Inc

Blue high power semiconductor laser PLS series

Tokyo Instruments, Inc

30+ people viewing

Last viewed: 21 hours ago

Response time: 36.51 hours

Laser Diodes

3 models listed

Compact Flash Lamp Pumped Q-Switch Nanosecond Nd:YAG Laser NL300 Series-Tokyo Instruments, Inc

Compact Flash Lamp Pumped Q-Switch Nanosecond Nd:YAG Laser NL300 Series

Tokyo Instruments, Inc

40+ people viewing

Last viewed: 5 hours ago

Response time: 36.51 hours

Laser Light Sources

3 models listed

High energy broadband tunable nanosecond laser NT230 series-Tokyo Instruments, Inc

High energy broadband tunable nanosecond laser NT230 series

Tokyo Instruments, Inc

30+ people viewing

Last viewed: 5 hours ago

Response time: 36.51 hours

Laser Light Sources

3 models listed

Tunable photoacoustic imaging light source PhotoSonus M-Tokyo Instruments, Inc

Tunable photoacoustic imaging light source PhotoSonus M

Tokyo Instruments, Inc

20+ people viewing

Response time: 36.51 hours

Laser Light Sources

2 models listed

Single Longitudinal Mode (SLM) High Energy Nanosecond Nd:YAG Laser ANL SLM Series-Tokyo Instruments, Inc

Single Longitudinal Mode (SLM) High Energy Nanosecond Nd:YAG Laser ANL SLM Series

Tokyo Instruments, Inc

30+ people viewing

Last viewed: 1 hour ago

Response time: 36.51 hours

Laser Light Sources

2 models listed

Maximum output 200mW, maximum 250nJ, <130fs, suitable for THz-TDS Femtosecond fiber seeder LightWire FFS series-Tokyo Instruments, Inc

Maximum output 200mW, maximum 250nJ, <130fs, suitable for THz-TDS Femtosecond fiber seeder LightWire FFS series

Tokyo Instruments, Inc

20+ people viewing

Last viewed: 9 hours ago

Response time: 36.51 hours

Laser Light Sources

2 models listed


View more products of Tokyo Instruments, Inc

About Company Handling This Product

Tokyo Instruments, Inc

Response Rate

100.0%

Response Time

36.5hrs

Company Overview

Tokyo Instruments, Inc., established in 1981, and headquartered in Tokyo, Japan, is a manufacturer of opto-ele...

See More

  • Japan

Related search keywords

Thermal Desorption Analyzers
Thermal Desorption Analyzers　Tokyo Instruments, Inc
Tokyo Instruments, Inc

This is the version of our website addressed to speakers of English in the United States. If you are a resident of another country, please select the appropriate version of Metoree for your country in the drop-down menu.

Copyright © 2024 Metoree