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Spectroscopic measurement System for transmission, reflection, scattering, and absorption measurement from vacuum ultraviolet to deep ultraviolet Wavelength range: 120 to 350nm Vacuum ultraviolet spectrophotometer VUVAS series-VUVAS1000
Spectroscopic measurement System for transmission, reflection, scattering, and absorption measurement from vacuum ultraviolet to deep ultraviolet Wavelength range: 120 to 350nm Vacuum ultraviolet spectrophotometer VUVAS series-Tokyo Instruments, Inc

Spectroscopic measurement System for transmission, reflection, scattering, and absorption measurement from vacuum ultraviolet to deep ultraviolet Wavelength range: 120 to 350nm Vacuum ultraviolet spectrophotometer VUVAS series
Tokyo Instruments, Inc

Tokyo Instruments, Inc's Response Status

Response Rate

100.0%

Response Time

30.7hours

Relatively Fast Response


About This Product

■Product overview

The VUVAS series vacuum ultraviolet spectrophotometer is a system that measures the reflection and transmission characteristics of optical elements, coatings, photoresist materials, substrates, etc. in a vacuum or nitrogen purge. It consists of a system, a sample chamber, and a detector. High throughput due to high-quality optical components achieves excellent reproducibility and high signal levels, allowing measurements to be performed with high signal-to-noise ratios.

■Features

・Supported wavelength range: 120 to 350 nm ・Accuracy: 0.05% (@157 nm) ・Vacuum degree: 10^-6 Torr ・Can be used with nitrogen purge ・Equipped with two detectors for reference and sample measurement (VUVAS2000) ・Filter hole can also be installed

  • Product

    Spectroscopic measurement System for transmission, reflection, scattering, and absorption measurement from vacuum ultraviolet to deep ultraviolet Wavelength range: 120 to 350nm Vacuum ultraviolet spectrophotometer VUVAS series

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1 Models of Spectroscopic measurement System for transmission, reflection, scattering, and absorption measurement from vacuum ultraviolet to deep ultraviolet Wavelength range: 120 to 350nm Vacuum ultraviolet spectrophotometer VUVAS series

Image Part Number Price (excluding tax) Accuracy (RSD, overall) Accuracy (RSD, @157nm) Nitrogen purge system Degree of vacuum Measurement wavelength range Wavelength repeatability Wavelength calibration accuracy Detector installation angle (variable) Stability (per hour) Band pass Step width Sample installation angle (variable)
Spectroscopic measurement System for transmission, reflection, scattering, and absorption measurement from vacuum ultraviolet to deep ultraviolet Wavelength range: 120 to 350nm Vacuum ultraviolet spectrophotometer VUVAS series-Part Number-VUVAS1000

VUVAS1000

Available upon quote

<0.5%

0.25%

Option

10^-4 Torr

120~350nm

0.05nm

0.1nm

10~180°

<1%

1~8nm

0.00006 nm

0~60°

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About Company Handling This Product

Response Rate

100.0%


Response Time

30.7hrs

Company Overview

Tokyo Instruments, Inc., established in 1981, and headquartered in Tokyo, Japan, is a manufacturer of opto-ele...

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  • Japan

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