Spectroscopic measurement System for transmission, reflection, scattering, and absorption measurement from vacuum ultraviolet to deep ultraviolet Wavelength range: 120 to 350nm Vacuum ultraviolet spectrophotometer VUVAS series
Tokyo Instruments, Inc
About This Product
■Product overview
The VUVAS series vacuum ultraviolet spectrophotometer is a system that measures the reflection and transmission characteristics of optical elements, coatings, photoresist materials, substrates, etc. in a vacuum or nitrogen purge. It consists of a system, a sample chamber, and a detector.
High throughput due to high-quality optical components achieves excellent reproducibility and high signal levels, allowing measurements to be performed with high signal-to-noise ratios.
■Features
・Supported wavelength range: 120 to 350 nm
・Accuracy: 0.05% (@157 nm)
・Vacuum degree: 10^-6 Torr
・Can be used with nitrogen purge
・Equipped with two detectors for reference and sample measurement (VUVAS2000)
・Filter hole can also be installed
-
Product
Spectroscopic measurement System for transmission, reflection, scattering, and absorption measurement from vacuum ultraviolet to deep ultraviolet Wavelength range: 120 to 350nm Vacuum ultraviolet spectrophotometer VUVAS series
-
Handling Company
Tokyo Instruments, Inc
-
Categories
1 Models of Spectroscopic measurement System for transmission, reflection, scattering, and absorption measurement from vacuum ultraviolet to deep ultraviolet Wavelength range: 120 to 350nm Vacuum ultraviolet spectrophotometer VUVAS series
| Product Image | Part Number | Price (excluding tax) | Accuracy (RSD, @157nm) | Accuracy (RSD, overall) | Band pass | Degree of vacuum | Detector installation angle (variable) | Measurement wavelength range | Nitrogen purge system | Sample installation angle (variable) | Stability (per hour) | Step width | Wavelength calibration accuracy | Wavelength repeatability |
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
|
|
VUVAS1000 |
Available upon quote | 0.25% | <0.5% | 1~8nm | 10^-4 Torr | 10~180° | 120~350nm | Option | 0~60° | <1% | 0.00006 nm | 0.1nm | 0.05nm |
Customers who viewed this product also viewed
Other products of Tokyo Instruments, Inc
View more products of Tokyo Instruments, Inc
About Company Handling This Product
- Japan